Zugriffsnummer 56803
Dokumenttyp Konferenzartikel
Sprache Englisch
Titel The SYRES III radiometer as primary standard for VUV and EUV detector calibration at PTB’s Metrology Light Source
Autor(in); Institution
Gottwald, Alexander; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Kolbe, Michael; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Kroth, Udo; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Krzyzagorski, Mark; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Laubis, Christian; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Scholze, Frank; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Quelle/Jahr The 16th International Conference on New Developments and Applications in Optical Radiometry : Book of Abstracts:(2026), 151 - 152
URL
Konferenzangaben NEWRAD 2026 - 16th International Conference on New Developments and Applications in Optical Radiometry, Seogwipo, 13-17, September, 2026, South Korea
Zusammenfassung The wavelength range between 8 nm and 200 nm is of interest for a number of applications, including scientific ones such as spectroscopy and space-based solar observations, as well as industrial processes, particularly those related to EUV lithography at a wavelength of about 13 nm. The measurement of radiation is dependent on photodetectors, which necessitate traceable calibration to primary detector standards. The SYRES III cryogenic radiometer is a dedicated instrument for primary calibrations using monochromatized synchrotron radiation of PTB's Metrology Light Source.
Themenbereich der Metrologie Photometrie und Radiometrie

Zitierung

Gottwald, A., Kolbe, M., Kroth, U., Krzyzagorski, M., Laubis, C., & Scholze, F. (2026). The SYRES III radiometer as primary standard for VUV and EUV detector calibration at PTB’s Metrology Light Source. NEWRAD 2026 - 16th International Conference on New Developments and Applications in Optical Radiometry, Seogwipo, 13-17, September, 2026, South Korea.

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