form measurement uncertainty ; peak-to-valley ; robust peak-to-valley ; clipped peak-to-valley ; root-mean-square ; Monte Carlo simulation ; Zernike polynomials
Zusammenfassung
The provided python software and Simulation data "PTB_ISO_14999-4_Zernike_Surface_Tool" enables the simulation and/or fitting of surface topographies on circular or rectangular apertures.
The provided python software and Simulation data "PTB_ISO_14999-4_KPI_Uncertainty_Tool" enables the user to determine the expanded measurement uncertainties of characteristic ISO 14999-4 KPIs (PV, PV%, PVr, RMS) in dependence of specified input uncertainties for topography height uncertainty at each Pixel and lateral displacement uncertainty for a specified sample under test (SUT) topography.
The user is enabled to:
-generate simulated custom topographies based on Zernike coefficients
-fit custom measurement data provided in a specified format and use it as input data
-receive the expanded measurement uncertainties of the ISO 14999-4 KPIs (PV, PV%, PVr, RMS) for the selected input data
The main executable files are:
-"ISO_14999-4_KPI_Uncertainty_Tool.py"
-"ISO_14999-4_Zernike_Tool_15_01_2026.py"
User data should be provided via the *.json files as explained in "Instruction for Input data.txt"
For more details about the specific folders and files contained in the package see section "Description of the individual files".
