| Zugriffsnummer | 56017 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Transfer of mTRL accuracy in industrial BiCMOS technology to commercial lumped-element calibrations up to 110 GHz |
| Autor(in); Institution |
Nguyen Dinh An, Samuel; STMicroelectronics, Technology Design Platform Department, Crolles, FRANCE; Institute of Electronics, Microelectronics and Nanotechnology (IEMN), Lille, FRANCE
Azevedo Goncalves, Joao; STMicroelectronics, Technology Design Platform Department, Crolles, FRANCE
|
| Quelle/Jahr | 2026 106th ARFTG Microwave Measurement Conference (ARFTG):(2026), 1 - 4 |
| ISSN | 2767-8776 (online) ; 2836-1407 (PoD) |
| ISBN | 979-8-3315-9080-2 (online) ; 979-8-3315-9081-9 (PoD) |
| DOI | |
| Verlag | Piscataway, NJ: IEEE |
| Konferenzangaben | 106th ARFTG Microwave Measurement, Los Angeles, CA, 18-21, January, 2026, USA |
| Freie Schlagworte | BiCMOS technology ; calibration ; on-wafer measurements |
| Zusammenfassung | Currently, on-wafer traceability is directly linked to multiline TRL (Thru Reflect Line), which is widely recognised as one of the most accurate on-wafer calibration methods. However, fixed-distance calibrations, such as Short Open Load Thru (SOLT) and Line Reflect Match (LRM), which use commercial impedance standard substrates (ISS), are generally favoured for industrial applications. Therefore, this paper will demonstrate how the accuracy of multiline TRL calibrations in industrial Bipolar Complementary Metal-Oxide-Semiconductor (BiCMOS) technology can be transferred to industrial calibrations using commercially available substrates. To the authors’ knowledge, this is the first time this has been achieved. |
| Themenbereich der Metrologie | Elektrizität und Magnetismus |
| Forschungsprojekt | EPM 23IND10 OnMicro |
| Förderinformationen (1) |
Förderername: European Commission (EC)
Förderer ID: 0000 0001 2242 8989 Förderer ID Typ: ISNI Förderprogramm: Metrology Partnership 2023 Industry Titel der Förderung: 23IND10: OnMicro: On-wafer microwave metrology for future industrial applications Förderungsnummer: 23IND10 |
Zitierung
Phung, G. N., Arz, U., Nguyen Dinh An, S., & Azevedo Goncalves, J. (2026). Transfer of mTRL accuracy in industrial BiCMOS technology to commercial lumped-element calibrations up to 110 GHz. 106th ARFTG Microwave Measurement, Los Angeles, CA, 18-21, January, 2026, USA. https://doi.org/10.1109/ARFTG68976.2026.11475013