| Zugriffsnummer | 56016 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | ohne Peer Review |
| Sprache | Englisch |
| Titel | On-wafer metrology for high-frequency circuits |
| Autor(in); Institution | |
| Quelle/Jahr | CAL LAB: Oct, Nov, Dec (2025), 20 |
| ISSN | 1095-4791 |
| URL | |
| Verlag | Aurora, Colo.: Cal Lab Solutions, Inc. |
| Freie Schlagworte | on-wafer metrology ; Traceable measurements ; coplanar waveguides |
| Zusammenfassung | To date, it has not been possible to compare on-wafer measurements because themeasuring equipment and laboratory conditions significantly differ from each other and there havenot been any reference substrates. The first international measurement comparison has now takenplace. PTB has confirmed its high-frequency calibration capabilities on reference substrates and hasdeveloped the world’s first complete measurement uncertainty budget of up to 330 GHz. |
| Kostenfreier Zugang | Freier Zugang |
| Rechteinformation | CC BY 4.0 ; Creative Commons Attribution 4.0 License |
| Themenbereich der Metrologie | Elektrizität und Magnetismus |
| Forschungsprojekt | 23IND10 OnMicro |
| Förderinformationen (1) |
Förderername: European Union (EU)
Förderprogramm: EPM 2023 Industry Titel der Förderung: 23IND10 OnMicro: On-wafer microwave metrology for future industrial applications Förderungsnummer: 23IND10 OnMicro |