| Zugriffsnummer | 55619 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Optical constants of Sc, V, Cr, Co, Ni, Nb, Mo, Rh, Pd, Hf, W, Re, Os, Ir, Pt, Au and ZrO2 in the extreme ultraviolet range |
| Autor(in); Institution |
Saadeh, Qais; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Sokolov, A.; HZB, Berlin, GERMANY
Störmer, M.; HZB, Berlin, GERMANY
Krishnamurthy, G.; HZB, Berlin, GERMANY
van de Kruijs, R.; Industrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, University of Twente, THE NETHERLANDS
Gullikson, E.; Lawrence Berkeley National Laboratory, Berkeley, California , USA
Quintanilha, R.; ASML Research, Veldhoven, THE NETHERLANDS
Philipsen, Vicky; imec, Delft, BELGIUM
Meltchakov, E.; Université Paris-Saclay, Institut d'Optique Graduate School, CNRS, Laboratoire Palaiseau, FRANCE
Delmotte, F.; Université Paris-Saclay, Institut d'Optique Graduate School, CNRS, Laboratoire Palaiseau, FRANCE
Kieler, Oliver; 2.4, Quantenelektronik, PTB-Braunschweig
Bieler, Mark; 2.4, Quantenelektronik, PTB-Braunschweig
Siewert, Frank; Helmholtz Center Berlin for Materials and Energy, Berlin, GERMANY
Rudolph, I.; Helmholtz Center Berlin for Materials and Energy, Berlin, GERMANY
Opsomer, K.; imec, Kapeldreef Leuven, BELGIUM
Wu, M.; imec, Kapeldreef Leuven, BELGIUM
Salami, Zanyar; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Laubis, Christian; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Babalik, Ayhan; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Garcia, Danilo Ocana; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Naujok, P.; optiX fab GmbH, GERMANY
|
| Quelle/Jahr | Optics Express: 34 (2026), 15, 28239 - 28292 |
| ISSN | 1094-4087 (online) |
| DOI | |
| Verlag | Washington: Optica Publishing Group |
| Zusammenfassung | Transition metal coatings are of fundamental value for Extreme Ultraviolet (EUV) optics. Often, the reported optical constants for transition metals in the EUV range exhibit inconsistencies considering different publications. Therefore, additional studies to determine optical constants in the EUV range for transition metals are highly relevant to further develop optical components. In our work, the optical constants of scandium, vanadium, chromium, cobalt, nickel, niobium, molybdenum, rhodium, palladium, hafnium, tungsten, rhenium, osmium, iridium, platinum, gold and zirconium dioxide are determined in parts of the EUV spectral range. The optical constants were determined from angle-dependent reflectance measurements collected using monochromatized synchrotron radiation. We also test capping solutions for thin coatings of scandium, vanadium, cobalt, niobium, molybdenum, hafnium, tungsten and rhenium. All of our results are presented in comparison with literature data. For many cases, our results present either significant scale deviation, or previously unresolved fine-structure in the widely used optical data compilations. |
| Kostenfreier Zugang | Open Access Hybrid |
| Rechteinformation | CC BY 4.0 ; Creative Commons Attribution 4.0 License |
| Themenbereich der Metrologie | Photometrie und Radiometrie |
| Innovationscluster | Systemische Metrologie |
| Geschäftsfelder | Metrologie für die Gesellschaft |
Zitierung
Saadeh, Q., Sokolov, A., Störmer, M., Krishnamurthy, G., van de Kruijs, R., Gullikson, E., Quintanilha, R., Philipsen, V., Meltchakov, E., Delmotte, F., Kieler, O., Bieler, M., Siewert, F., Rudolph, I., Opsomer, K., Wu, M., Salami, Z., Laubis, C., Babalik, A., Garcia, D. O., Naujok, P., Scholze, F., & Soltwisch, V. (2026). Optical constants of Sc, V, Cr, Co, Ni, Nb, Mo, Rh, Pd, Hf, W, Re, Os, Ir, Pt, Au and ZrO2 in the extreme ultraviolet range. Optics Express, 34(15), 28239–28292. https://doi.org/10.1364/OE.595748