| Zugriffsnummer | 55199 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Polygon-based unified Fourier-modal approach for diffractive-optics simulations |
| Autor(in); Institution | |
| Quelle/Jahr | Physical Review A: 112 (2025), 4, 043511-1 - 043511-13 |
| Artikelnummer | 043511 |
| ISSN | 2469-9926 (print) ; 2469-9934 (online) |
| DOI | |
| URL | |
| Verlag | New York, NY: American Physical Society (APS) |
| Zusammenfassung | In this article, we derive a theoretical formalism that unifies the rigorous coupled wave analysis and the dynamical diffraction theory. Based on this formalism, we design a computational approach for the diffraction calculation for the nanoscale lamellar gratings with an arbitrary line profile shape. In this approach, the gratings line profile is approximated as a polygon. This proves to be convenient since such an approach does not rely on the geometry model of the grating. We test the proposed approach against other computational theories and a synchrotron scattering experiment. |
| Themenbereich der Metrologie | Photometrie und Radiometrie |
| Förderinformationen (1) | Förderername: Russian Academy of Sciences |
Zitierung
Nikolaev, K. V., Soltwisch, V., Botchev, M. A., Fernández Herrero, A., Hönicke, P., Scholze, F., & Yakunin, S. N. (2025). Polygon-based unified Fourier-modal approach for diffractive-optics simulations. Physical Review A, 112(4), 043511-1–043511-13. https://doi.org/10.1103/n2qj-l886