| Zugriffsnummer | 54532 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Metrology lasers for traceable length metrology in nanopositioning machines – towards a 10-12 uncertainty level in vacuum wavelength |
| Übersetzungstitel | Metrologielaser für die rückführbare Längenmessung in Nanopositioniermaschinen - auf dem Weg zu einem Unsicherheitsniveau von 10E-12 in der Vakuumwellenlänge |
| Autor(in); Institution |
Blumröder, Ulrike; TU Ilmenau, Ilmenau, GERMANY
Fröhlich, Thomas; TU Ilmenau, Ilmenau, GERMANY
Ortlepp, Ingo; TU Ilmenau, Ilmenau, GERMANY
Kissinger, Thomas; TU Ilmenau, Ilmenau, GERMANY
Manske, Eberhard; TU Ilmenau, Ilmenau, GERMANY
|
| Quelle/Jahr | Measurement: 257 (2026), Part A, 1 - 12 |
| Artikelnummer | 118512 |
| ISSN | 0263-2241 (print) ; 1873-412X (online) |
| DOI | |
| URL | |
| Verlag | Amsterdam: Elsevier |
| Freie Schlagworte | Precision metrology ; Frequency stability ; Ultrastable laser sources ; Interferometry ; Linewidth ; Traceability ; GPS-referenced frequency comb |
| Zusammenfassung | In this contribution, we propose a diode laser stabilized to an ultrastable cavity (ORS) as a metrology laser for interferometry in nanopositioning and measuring machines (NPMM) with measurement ranges up to 1 m. Based on a time-dependent linewidth analysis of frequency-stabilized He-Ne-lasers traditionally used in precision interferometry and a GPS-referenced frequency comb we address some limitations of the previously introduced concept of a comb-referenced He-Ne-source. The new approach perspectively aims to establish a unified frequency and length standard by connecting to the SI second while meeting the high technical requirements of interferometric length measurement systems regarding bandwidth and optical power. Thus, in preparation of an integration as a metrology laser a detailed analysis of long-term frequency changes has been performed. They revealed that during daily operation, cavity-related frequency changes would fall below the digital resolution limit of the interferometric measurement systems (2.86 × 10−11) within the NPMM-200 and can be neglected if a sufficient predetermination of the absolute frequency using an optical frequency comb is applied. Long-term measurements of the ORS against an optical frequency comb revealed peak-to-peak frequency changes up to 81 kHz for observation times up to ten days resulting in an expanded relative uncertainty of Urel-ORS = 1.48 × 10−10 for the corresponding vacuum wavelength. This indicates that prior to integrating the ORS into the interferometric measurement system of the NPMM-200 an effective correction procedure for long-term variations of the cavity-stabilized diode laser has to be established to achieve a time-independent uncertainty level in the order of 10−12. |
| Kostenfreier Zugang | Open Access Hybrid |
| Rechteinformation | CC BY 4.0 ; Creative Commons Attribution 4.0 License |
| Themenbereich der Metrologie | Länge, dimensionelle Metrologie ; Zeit und Frequenz |
| Innovationscluster | Systemische Metrologie |
| Geschäftsfelder | Grundlagen der Metrologie |
| Förderinformationen (1) |
Förderername: Deutsche Forschungsgemeinschaft (DFG)
Förderer ID: 0000 0001 2096 9829 Förderer ID Typ: ISNI Titel der Förderung: Präzisionsinterferometrie auf Basis hochstabiler Laserquellen bei 633 nm Förderungsnummer: 542290024 URI der Förderung: https://gepris.dfg.de/gepris/projekt/542290024 |
Zitierung
Blumröder, U., Köchert, P., Fröhlich, T., Ortlepp, I., Kissinger, T., & Manske, E. (2026). Metrology lasers for traceable length metrology in nanopositioning machines – towards a 10⁻¹² uncertainty level in vacuum wavelength. Measurement, 257(Part A), 1–12. https://doi.org/10.1016/j.measurement.2025.118512