| Zugriffsnummer | 54497 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Novel nanopositioning system with improved range, dynamics and accuracy |
| Autor(in); Institution |
Marth, Harry; Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, GERMANY
Schröder, Michael; Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, GERMANY
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| Quelle/Jahr | Proceedings of the 25th international conference of the european society for precision engineering and nanotechnology, 9th – 13th June 2025, Zaragoza, ES:(2025), 224 - 225 |
| ISBN | 978-1-9989991-6-3 (PDF) |
| Konferenzangaben | euspen 25th International Conference & Exhibition, Zaragoza, 09-13, Juni, 2025, Spain |
| Freie Schlagworte | nanopositioning system ; force compensation ; piezo actuators ; accuracy ; range ; dynamic, |
| Zusammenfassung | For a nanopositioning system (NPS), its performance is typically characterised by three categories of specifications: motion range, dynamics, and accuracy. In the development of a NPS, it is generally very difficult to enhance all these specifications at the same time, and often a trade-off between them must be taken. This paper presents a novel design of a NPS with all specifications (i.e. range, dynamics and accuracy) improved. Two important design concepts have been applied to achieve this ambitious goal. The first concept concerns the hybrid application of monocrystalline piezo actuators and polycrystalline piezo actuators. Due to undesired behaviour such as hysteresis, nonlinearity and creep, polycrystalline piezo actuators are often applied with flexure hinge mechanics and operated in closed-loop using accurate position sensors in a NPS. However, the added motion mass of the guideway mechanics and the phase lag of the closed-loop system may deteriorate the dynamics of the NPS. In contrast, monocrystalline piezo actuators do not suffer from hysteresis, nonlinearity and creep. They can be directly applied for generating high accurate and high dynamic motions in open-loop. However, monocrystalline piezo actuator suffers from its very small motion range due to its (much) smaller piezoelectric coefficients than that of polycrystalline piezo actuator. Thus, the hybrid application of two types of actuators is advantageous for realising both a large range and a high dynamic motion. The other concept concerns a mechanism for compensatingreaction forces. Accelerated movements generate reaction force, leading to noticeable vibrations in a NPS. It is particularly important in high dynamic motions, as the magnitude of the reaction force relates with the quadratic of frequency. To overcome this problem, compensating actuators which move in an opposite direction are applied. The design concepts have been successfully implemented in the development of a new NPS aimed for a high-speed large-range atomic force microscope. |
| Themenbereich der Metrologie | Nanometrologie |