| Zugriffsnummer | 54232 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Measurement Noise and Instrument Transfer Function Characterization of a Phase Shifting Measuring Module of a Hybrid-Microscope |
| Autor(in); Institution |
Jiao, Ziyang; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Tutsch, Rainer; Institute for Production Measurement Technology, Technical University of Braunschweig, Braunschweig, GERMANY
|
| Quelle/Jahr | NanoScale 2023: Dimensional and related measurements in the micro- and nanometre range:(2023), 187 - 189 |
| Artikelnummer | P-34 |
| Konferenzangaben | Nanoscale, Helsinki, 10-12, October, 2023, Finland |
| Freie Schlagworte | phase shifting interferometry ; noise characterization ; instrument transfer function ; surface metrology |
