| Zugriffsnummer | 53840 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | 3-axis force compensated piezo stage combination for high-speed SPM |
| Autor(in); Institution |
Moehler, Felix; Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, GERMANY
Marth, Harry; Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, GERMANY
Schröder, Michael; Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, GERMANY
|
| Quelle/Jahr | Measurement Science and Technology: 36 (2024), 1, 1 - 17 |
| Artikelnummer | 015049 |
| ISSN | 0957-0233 (print) ; 1361-6501 (online) |
| DOI | |
| Verlag | Bristol: IOP Publishing |
| Freie Schlagworte | high-speed AFM ; 6-DOF piezo stage ; SPM scanner ; serial combination ; force compensation |
| Zusammenfassung | Scanning stages are immanent for scanning probe microscope type tools and highly impact most of their properties, such as scanning speed and positioning accuracy. In this contribution, a serial assembly of an in open-loop operated 3-axes monocrystalline piezo stage with an in closed-loop operated 6-axes polycrystalline piezo stage is presented. The monocrystalline piezo stage is applied to enhance the limited bandwidth of the polycrystalline piezo stage and includes an internal compensation mechanism for reaction forces. The compensation mechanism is designed to operate the scanner as a no retroactive stage by reducing the dynamic scanning motion errors in high-speed application to a minimum. It works for sinusoidal oscillations and shows a frequency dependence. The monocrystalline piezo stage has a position noise of <0.1 nm (1σ) in z-direction, positioning bandwidth >1 kHz and travel range 1 × 1 × 1 μm in x-, y-, z-direction, respectively. The 6-axes piezo stage complements this assembly with a position noise of <0.35 nm (1σ) in x-, y- and z-direction, a closed-loop bandwidth >200 Hz, a rotation range of ±0.5 mrad, and a travel range 45 × 45 × 45 μm in x-, y-, z direction, respectively. |
| Kostenfreier Zugang | Open Access Hybrid |
| Rechteinformation | CC BY 4.0 ; Creative Commons Attribution 4.0 License |
| Forschungsprojekt | 20IND08: MetExSPM: Traceability of localised functional properties of nanostructures with high speed scanning probe microscopy |
| Förderinformationen (1) |
Förderername: European Commission (EC)
Förderer ID: 0000 0001 2242 8989 Förderer ID Typ: ISNI Förderprogramm: EMPIR 2020 Industry Titel der Förderung: 20IND08: MetExSPM: Traceability of localised functional properties of nanostructures with high speed scanning probe microscopy Förderungsnummer: 20IND08 |