IMEKO 2024 XXIV World Congress, Hamburg, 26-29, August, 2024, Germany
Freie Schlagworte
Ionisation vacuum gauge ; High Vacuum ; Calibration ; Transfer Standard ; ISO
Zusammenfassung
With ISO TS 6737, published in November 2023, it is the first time that the design of a vacuum gauge was standardised. It eliminates the lack of a reliable ionisation vacuum gauge in the high vacuum range. The measurement range of the new type of ionisation vacuum gauge covers the range from 10−6 Pa to 10−2 Pa, which is the most important range for industrial high vacuum applications. The Technical Specification ISO TS 6737 describes the design and the characteristics of the gauge of high metrological quality. The new gauge can be used as a reference standard for the calibration of other vacuum ionisation gauges and quadrupole mass spectrometers. It is already in use in an accredited laboratory in Germany. As the sensitivity is predictable within a range of 2.5 %, the manufacturer does not need to calibrate it. For a calibrated instrument, a standard measurement uncertainty of 1 % can be expected. Repeatability, reproducibility, and transport stability are within 1 %. It is also attractive for industrial applications because there is no need to calibrate or readjust a vacuum process when changing gauges
Kostenfreier Zugang
Open Access Gold
Zitierung
Jousten, K. (2025). ISO TS 6737: The first standardised vacuum gauge. Measurement: Sensors, 38(Suppl.), e1–e4. https://doi.org/10.1016/j.measen.2024.101678
