| Zugriffsnummer | 52265 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Calibration of reference spheres by double-ended interferometry |
| Autor(in); Institution |
Neupert-Wentz, Tillman; 5.4, Interferometrie an Maßverkörperungen, PTB-Braunschweig
Bartl, Guido; 5.4, Interferometrie an Maßverkörperungen, PTB-Braunschweig
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| Quelle/Jahr | Proceedings of the 24th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen):(2024), 147 - 150 |
| ISBN | 978-1-9989991-5-6 (PDF) |
| URL | |
| Verlag | Bedford: euspen |
| Konferenzangaben | euspen’s 24th International Conference & Exhibition, Dublin, 9-13, June, 2024, Ireland |
| Freie Schlagworte | Interferometry ; reference spheres ; metrology |
| Zusammenfassung | Reference spheres are a standard tool for the calibration of coordinate measuring machines (CMMs). Typically, the calibration of a reference sphere considers the diameter and the sphericity on the equator. Because spheres in CMMs form the foundation of dimensional 3D metrology, it is important to develop methods that can ensure low uncertainty, easy manipulation and short calibration times with regard to other interferometric calibration techniques, for example those of the Avogadro project [1]. The required improvements are, firstly, to provide a diameter topography, and secondly, to decrease the measurement uncertainty. To fulfil these requirements, a new measurement setup has been proposed. The setup utilises PTB’s double-ended interferometer (DEI) which has originally been developed for gauge block calibrations without wringing. By adding focusing optics to the measurement path, measurements on spheres can be done through interference of plane wavefronts. In this work, the initial implementation of the proposed modifications is presented. First results are validated, and the required measurement uncertainty budget is compiled. Based on the experience of the first measurement campaign, possibilities for improvement are identified and presented. |
| Themenbereich der Metrologie | Länge, dimensionelle Metrologie |