| Zugriffsnummer | 52062 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Laser cutting and structuring for processing aluminium nitride chips for optical clocks |
| Autor(in); Institution |
Feist, Carsten; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Albrecht, Daniel; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 24th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen):(2024), 381 - 384 |
| Herausgeber(in) |
Riemer, Oltmann; University of Bremen (LFM), Bremen, GERMANY
|
| ISBN | 978-1-9989991-5-6 (PDF) |
| Verlag | euspen: Bedford |
| Konferenzangaben | euspen's 24th International Conference & Exhibition, Dublin, 10-14, June, 2024, Ireland |
| Freie Schlagworte | Development ; Laser beam machining ; Manufacturing ; Processing |
| Zusammenfassung | Ultrashort-Pulse (USP) lasers are the state-of-the-art tools for the precise processing of sensitive, even coated workpieces. In this study, laser cutting, and laser micro-structuring processes are presented as steps in the manufacturing chain for gold coated aluminium-nitride (AlN) chips. The results of processing with a laser with a pulse width of 20 ns and a wavelength of 355 nm (UV) are compared with the results with a USP laser system with wavelengths of 1030 nm (IR), 515 nm (VIS) and 343 nm (UV). The choice of the laser source and of the process parameters affect the quality of the edges, the amount and mechanism for creating aluminium on processed surfaces and the existence and treatment of melted material and thus the entire manufacturing chain. It is shown that the use of USP exhibits several advantages and thus minimizes the complexity of the manufacturing chain. |
