| Zugriffsnummer | 51786 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Concept for improving the form measurement results of aspheres and freeform surfaces in a tilted-wave interferometer |
| Autor(in); Institution |
Yang, Ling; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
|
| Quelle/Jahr | Journal of Sensors and Sensor Systems: 13 (2024), 1, 89 - 97 |
| ISSN | 2194-8771 (print) ; 2194-878X (online) |
| DOI | |
| Verlag | Göttingen: Copernicus |
| Freie Schlagworte | white light interferometry ; coherence ; distance measurement ; transparent specimen ; tilted-wave interferometry |
| Zusammenfassung | Accurate and flexible form measurements for aspherical and freeform surfaces are in high demand, and non-null-test interferometric methods such as tilted-wave interferometry have gained attention as a promising response to this need. Interferometric methods, however, display ambiguities between the measurement of certain form errors and the misalignment of the measured specimen. Therefore, improved knowledge of the absolute measurement position of the specimen in relation to the interferometer setup may improve the form measurement result. In this work, we propose a concept that uses a white light interferometer to measure the absolute distance between a transparent specimen's surface and the interferometer's objective and present preparatory data to qualify the white light interferometer for the improvement of tilted-wave interferometer measurements. |
| Kostenfreier Zugang | Open Access Gold |
| Rechteinformation | CC BY 4.0 ; Creative Commons Attribution 4.0 License |
| Themenbereich der Metrologie | Länge, dimensionelle Metrologie |
| Forschungsprojekt | AbsoForm |
| Förderinformationen (1) |
Förderername: Deutsche Forschungsgemeinschaft (DFG)
Förderer ID: 0000 0001 2096 9829 Förderer ID Typ: ISNI Titel der Förderung: Absolute Form-Interferometrie für Asphären und Freiformflächen (AbsoForm) Förderungsnummer: 496703792 URI der Förderung: https://gepris.dfg.de/gepris/projekt/496703792?context=projekt&task=showDetail&id=496703792& |
Zitierung
Scholz, G., Yang, L., Schake, M., & Fortmeier, I. (2024). Concept for improving the form measurement results of aspheres and freeform surfaces in a tilted-wave interferometer. Journal of Sensors and Sensor Systems, 13(1), 89–97. https://doi.org/10.5194/jsss-13-89-2024