| Zugriffsnummer | 51276 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Compensation method of measurement deviation by the lateral positioning axis for topography measurements with Heterodyne Interferometry [poster] |
| Autor(in); Institution |
Leitz, Dennis; Institute of Electrical Information Technology, TU Clausthal, Clausthal-Zellerfeld, GERMANY
Rembe, Christian; Institute of Electrical Information Technology, TU Clausthal, Clausthal-Zellerfeld, GERMANY
|
| Quelle/Jahr | NanoScale 2023: Dimensional and related measurements in the micro- and nanometre range:(2023), 127 - 131 |
| Artikelnummer | P-14 |
| Konferenzangaben | NanoScale 2023, Helsinki, 10-12, October, 2023, Finland |
| Freie Schlagworte | Confocal heterodyne-interferometer microscope ; Laser Doppler vibrometer ; surface-topography analysis |
