| Zugriffsnummer | 51240 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | The influence of the orientation of a 3D standard on the determination of marker coordinates for the development of a calibration method using optical microscopes |
| Autor(in); Institution |
Heinrich, Lena; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Felgner, André; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Dziomba, Thorsten; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Hellmich, C.; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Gao, Sai; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Tutsch, Rainer; TU Braunschweig, Institut für Produktionsmesstechnik, Braunschweig, GERMANY
Hemmleb, M.; point electronic Gmb, Halle (Saale), GERMANY
|
| Quelle/Jahr | NanoScale 2023: Dimensional and related measurements in the micro- and nanometre range:(2023), 269 - 270 |
| Artikelnummer | P-75 |
| Konferenzangaben | NanoScale 2023, Helsinki, 10-12, October, 2023, Finland |
| Freie Schlagworte | 3D calibration ; Optical microscopy ; CLSM ; Coordinate determination ; 3D Standards ; Marker-based standards ; Uncertainty influences |
| Zusammenfassung | 3D optical microscopes are more and more used for quantitative measurements of objects with geometrical features in the order of micro- and sub-micrometer range. To ensure the traceability of the measurements, appropriate calibration standards and procedures for the calibration of 3D optical microscopes need to be developed. For 3D optical microscopes, not only the amplification coefficients and linearity deviations of the vertical and horizontal axes, but also the perpendicularity between them need to be calibrated. In previous work [1] a landmark-based 3D standard for SPM 3D calibration has been developed, which allows to determine scaling factors and perpendicularity deviations of the axes of a SPM in one step. The 3D standard is featured by step-shaped pyramid structures with coordinate points by markers located at different positions on the steps. The 3D reference structure was produced by focused ion beam (FIB) induced metal deposition. The size of the established 3D standards was adapted to nanoscale applications (atomic force and electron microscopy). With the FIB manufacturing process, it is time-consuming and expensive to produce larger 3D standards that are suitable for the measurement range of optical microscopes. In this work a 3D standard fabricated using wafer-based technology is presented. The sizes of these standards can be easily adapted to be suitable for the calibration of optical 3D microscopy with different objectives. The standards are featured with cylindrical markers, whose center coordinates are the basis of the geometric 3D calibration. Figure 1 shows two examples of 3D standards developed for the calibration of optical microscopy. Within the scope of a funded project, besides the high-end calibration using AFM, a low-cost calibration strategy for the new standards using a confocal laser scanning microscopy (CLSM) need to be developed and investigated. The main influence factors to measurement uncertainty need to be determined. In this work, the first steps for the calibration of the 3D micro standard using a confocal laser scanning microscope are investigated. As the coordinates of the markers serve as the basis for the calibration of the standard and the subsequent calculations, the influencing parameters on the coordinate determination of the markers are investigated. Thereby, influences which occur during the measurement of the standard itself and influences which occur during the subsequent evaluation are to be distinguished. The measurement-related influences that arise, on the one hand, due to the measurement procedure and, on the other hand, due to the positioning on the 3D structure in the measuring instrument are investigated. Possible positions and orientations, whose influence on the coordinate determination is to be analyzed include the position of the pyramid structure in the field of view, the alignment with respect to the scan axes of the measuring device and the tilting. With these investigations the measurement uncertainties of the coordinates of the markers located on the pyramid structures will be determined. |
Zitierung
Heinrich, L., Felgner, A., Dziomba, T., Hüser, D., Hellmich, C., Gao, S., Tutsch, R., & Hemmleb, M. (2023). The influence of the orientation of a 3D standard on the determination of marker coordinates for the development of a calibration method using optical microscopes. NanoScale 2023, Helsinki, 10-12, October, 2023, Finland.