| Zugriffsnummer | 51206 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Sub-micron inline thickness measurement of cold-rolled metal strips by multi-wavelength interferometry and laser triangulation |
| Autor(in); Institution |
Krauhausen, Michael; VOLAS GmbH, Aachen, GERMANY
Priem, Roland; VOLAS GmbH, Aachen, GERMANY
|
| Quelle/Jahr | Optics Express: 31 (2023), 26, 43804 - 43820 |
| Availability | [online only] |
| ISSN | 1094-4087 (online) |
| DOI | |
| Verlag | Washington, DC: Optica |
| Freie Schlagworte | thickness gauge ; distance sensor ; 2f/3f interferometry ; sinusoidal modulation interferometry ; multi-wavelength interferometry ; laser triangulation ; measurement uncertainty |
| Zusammenfassung | Thin metal foils of thicknesses below 100 µm are finding increasing use in high-tech applications. For such foils it is essential that production be controlled inline with sub-micron accuracy in highly challenging environments. An optical thickness gauge combining laser triangulation with multi-wavelength interferometry has now been developed for this purpose. Modulation-based 2f-3f-interferometry was used to realize a compact and robust sensor. A thorough measurement uncertainty analysis of the complete thickness measurement process yielded an expanded measurement uncertainty of U =sqrt((0.3 μm)2+4 π Ra2), which is dependent on the roughness average Ra The influence of oil remnants on measurement results is significantly weaker in the interference measurement than in geometric optical systems. Verification measurements against tactile reference measurements support the derived measurement uncertainty, and initial measurements in actual rolling mill environments have proven the real-world capability of this measurement technique over relevant process time scales at metal strip speeds of 200 m/min. |
| Kostenfreier Zugang | Open Access Gold |
| Rechteinformation | CC BY 4.0 ; Creative Commons Attribution 4.0 License |
| Themenbereich der Metrologie | Länge, dimensionelle Metrologie |
| Förderinformationen (1) |
Förderername: Bundesministerium für Wirtschaft und Klimaschutz (BMWK)
Förderer ID: 0000 0001 0945 2036 Förderer ID Typ: ISNI Förderprogramm: TransMeT 2016-II-07 Förderungsnummer: ZIM EP190169 |