| Zugriffsnummer | 51100 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Characterization of the topographic spatial resolution of optical surface topography measuring instruments using rectangular gratings and sinusoidal pseudo-chirp standards |
| Autor(in); Institution |
Felgner, André; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Dziomba, Thorsten; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | NanoScale 2023: Dimensional and related measurements in the micro- and nanometre range:(2023), 177 - 178 |
| Artikelnummer | P-31 |
| Konferenzangaben | NanoScale 2023, Helsinki, 10-12, October, 2023, Finland |
| Freie Schlagworte | Optical surface topography measuring instrument ; topographic spatial resolution ; topography fidelity ; rectangular gratings ; sinusoidal chirp |
| Zusammenfassung | Topographic spatial resolution WR is defined as one of the seven metrological characteristics for surface texture measurement methods in ISO 25178 part 600 describing the ability of a surface topography measuring instrument to distinguish closely spaced surface features [1]. To quantify the topographic spatial resolution several parameters and functions can be used depending on the application and the method of measurement, including the Rayleigh or Sparrow criterion, the width limit for full height transmission Wl, the small scale fidelity limit TFIL and some other quantities. The Rayleigh or Sparrow criterion is more suitable for a characterization of the instrument response to features which have heights much less than the illumination wavelength. For surface texture with height parameters in the submicro- and micrometre range, the topographic spatial resolution depends on both the spatial wavelengths and the heights of surface features, and on the method used to probe the surface as well. Therefore, within the framework of the EMPIR project TracOptic, two parameters, the width limit for full height transmission Wl and the small scale fidelity limit TFIL, are chosen to characterize the topographic spatial resolution of optical surface measuring instruments. As topographic spatial resolution also depends on the shape of the surface features, two gratings with rectangular structures and PTB’s sinusoidal pseudo-chirp standard [2] were used in this investigation. When evaluating Wl or TFIL by measurement, the height of the rectangular gratings or sinusoidal structures is normally chosen to be close to that of the actual surface of interest. Here three sets of rectangular gratings RS-M 0.09, RS-M 3 [3], RS-N [4] with 90 nm, 190 nm and 3 μm nominal height are selected for Wl evaluation. The RS-M gratings have pitch values from 4 μm to 800 μm and the RSN gratings from 0.3 μm to 6 μm. For TFIL evaluation, PTB’s sinusoidal chirp standard is selected. The chirp standard is fabricated by an ultra-precision diamond turning process. It contains nine sinusoidal chirp grating fields with different amplitudes from 0.05 μm to 10 μm. Each of them consists of a discrete variation of spatial wavelengths starting from 2.6 μm and ranging up to 82.8 μm. Measurements on the RS-M and RS-N gratings and PTB’s chirp standards have been performed using a confocal microscope with 20x, 50x and 100x objectives. To determine the small scale fidelity limit TFIL the measured topography fidelity, defined as the closeness of agreement between a measured surface profile or measured topography and one whose uncertainties are insignificant by comparison [1], will be discussed and first evaluation results of Wl and TFIL with given tolerances will be presented. The evaluated results of Wl and TFIL will be analyzed and compared with each other. A simple model to determine the measurement uncertainty contribution for surface texture measurements in terms of the topographic spatial resolution using the evaluated results will be developed. |
| Forschungsprojekt | 20IND07: TracOptic: Traceable industrial 3D roughness and dimensional measurement using optical 3D microscopy and optical distance sensors |
| Förderinformationen (1) |
Förderername: European Commission (EC)
Förderer ID: 0000 0001 2242 8989 Förderer ID Typ: ISNI Förderprogramm: EMPIR 2020 Industry Titel der Förderung: 20IND07: TracOptic: Traceable industrial 3D roughness and dimensional measurement using optical 3D microscopy and optical distance sensors Förderungsnummer: 20IND07 |
Zitierung
Gao, S., Hüser, D., Felgner, A., Brand, U., & Dziomba, T. (2023). Characterization of the topographic spatial resolution of optical surface topography measuring instruments using rectangular gratings and sinusoidal pseudo-chirp standards. NanoScale 2023, Helsinki, 10-12, October, 2023, Finland.