| Zugriffsnummer | 51065 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Systematic performance deviations of optical surface topography measuring instruments |
| Autor(in); Institution | |
| Quelle/Jahr | NanoScale 2023: Dimensional and related measurements in the micro- and nanometre range:(2023), 47 - 48 |
| Artikelnummer | D-3 |
| Konferenzangaben | NanoScale 2023, Helsinki, 10-12, October, 2023, Finland |
| Zusammenfassung | In the EMPIR project "TracOptic" the measurement capabilities of optical surface topography measuring instruments are characterized according to the ISO 25178-700 [1] calibration framework for basic instrument calibration by calibrating seven metrological characteristics using appropriate material measures. In this work the systematic performance deviations, related to the new metrological characteristic "topography fidelity", defined in ISO 25178-600 [2], are systematically investigated. Sinusoidal chirp standards with nine different amplitudes from 50 nm to 10 μm and wavelengths ranging from 2.6 μm to 82.8 μm developed at PTB [3], rectangular resolution standards RS-M [4] and RS-N [5] and areal roughness standards ARS [6] from SiMetrics are used for the investigation of influencing quantities including surface slopes, curvatures and discontinuous features (sharp edges), aspect ratios and different measurement principles as well. Four instrument types including confocal microscopes, coherence scanning interferometry, focus variation instruments and optical distance sensors are investigated within this project. Different experimental methods for investigation of the systematic deviations are carried out, including measuring the material measures with different microscope objectives, with different orientations, in different positions in the field of view and comparing with reference measurement results. Overshooting and batwings introduced by larger slopes and discontinuous features, inhomogeneity within the FOV, difference between different measurement orientations are observed and analyzed. For areal roughness standards the comparability of the measurement results with different microscope objectives are investigated by comparing the measured slope distribution, power spectral density (PSD) or comparing with reference measurement results. The impact of S-filtering for the comparability of the measurement results has been investigated as well. An example of the measurement uncertainty contribution for surface texture measurements in terms of the topography fidelity using the evaluated results will be presented in this paper. |
| Forschungsprojekt | 20IND07: TracOptic: Traceable industrial 3D roughness and dimensional measurement using optical 3D microscopy and optical distance sensors |
| Förderinformationen (1) |
Förderername: European Commission (EC)
Förderer ID: 0000 0001 2242 8989 Förderer ID Typ: ISNI Förderprogramm: EMPIR 2020 Industry Titel der Förderung: 20IND07: TracOptic: Traceable industrial 3D roughness and dimensional measurement using optical 3D microscopy and optical distance sensors Förderungsnummer: 20IND07 |