| Zugriffsnummer | 51061 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | New ways to calibrate microscopes at nanoscale: How the Silicon lattice parameter is used for new type calibration artefacts |
| Autor(in); Institution |
Busch, Ingo; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Bergemann, Lisa; PTB-Braunschweig, formerly
Ostermann, Johannes; PTB-Braunschweig, formerly
Fernandez Scarioni, Michelle; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | NanoScale 2023: Dimensional and related measurements in the micro- and nanometre range:(2023), 13 - 14 |
| Artikelnummer | A-1 |
| Konferenzangaben | NanoScale 2023, Helsinki, 10-12, October, 2023, Finland |
| Freie Schlagworte | crystalline standards ; nanotechnology ; calibration ; digital asstiance |
| Zusammenfassung | Without calibrated measuring instruments, reliable scientific work or innovative industrial production are only feasible to a very limited extent due to the lack of comparability of measurement results. However, in the promising field of nanotechnology, i.e. for length measurements below 100 nm, the starting position is currently very challenging. Suitable standards can only be produced with significant technical effort and are correspondingly expensive. At the same time, the application of the standards, i.e. the reliable calibration of microscopes, is technically challenging in this area and requires a high level of expertise. Result: Often, high-performance microscopes, such as AFM, are insufficiently or incorrectly calibrated [1]. Crystalline standards can be the starting point for a sustainable improvement of the situation. The advantage of these standards is the direct traceability to the lattice parameter of the silicon. In previous studies, among others carried out within the framework of the JRP Crystal, the efficiency of this approach could be demonstrated. E.g. for step height standards, important for the calibration of the z-axis of microscopes, the smallest step (respectively resolution) and the associated uncertainty could be reduced by more than a factor of 10 in each case. This proof-of-principle has accordingly found its way into the mis en practique of the new SI in 2019, in which the lattice parameter is explicitly named as a secondary realization of the unit "meter" up to 100 nm. Thus, the necessary prerequisites are given to provide new, cost-effective crystalline standards on the basis of the lattice parameter. Important groundwork has been done at PTB in the last few years. A new apparatus for the production of crystalline standards has been designed, constructed and calibrated (see presentation A-3 by Daul et al.). The concept of this apparatus envisages scalability and modular design in order to be able to easily implement combinations with organic functionalization (e.g. DNA origami). These combinations offer the possibility to combine the accuracy and direct traceability of the crystalline standards with organic functionalization, in order to increase or adapt the dimensions of the standards in such a way that standards are available at low cost and customized to the intended application. The crystalline standards are created by a self-organization process. This results in the need to revise the concepts of data evaluation. At the same time, the standards also provide so-called a-priori properties that can be used in data evaluation to enable a reliable characterization of instrument properties. With this a-priori information, starting points for a new methodology of data evaluation and calibration arise, which offers a great potential to support the user with digital assistance systems to such an extent that also the second major hurdle for calibrations can be removed and calibrations of microscopes can be performed more easily. In the presentation an overview of the current work will be given and the necessary next steps for making it available for routine use will be discussed. |
Zitierung
Busch, I., Daul, L., Bergemann, L., Ostermann, J., Fernandez Scarioni, M., & Wang, Z. (2023). New ways to calibrate microscopes at nanoscale: How the Silicon lattice parameter is used for new type calibration artefacts. NanoScale 2023, Helsinki, 10-12, October, 2023, Finland.