| Zugriffsnummer | 50499 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Recent progress on AFM techniques for traceable 3D nanometrology at PTB |
| Autor(in); Institution |
Degenhardt, Johannes; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Hahm, Kai; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Tutsch, Rainer; Technische Universität IPROM, Braunschweig, GERMANY
|
| Quelle/Jahr | SMSI 2023 Sensor and Measurement Science International - Proceedings:(2023), 243 - 244 |
| ISBN | 978-3-9819376-8-8 |
| DOI | |
| Verlag | Wunstorf: AMA Service GmbH |
| Konferenzangaben | Sensor and Measurement Science International, Nürnberg, 08-11, May, 2023, Germany |
| Freie Schlagworte | Atomic Force Microscopy ; dimensional nanometrology ; traceability ; calibration ; critical dimension (CD) ; tilting AFM ; tip characterization ; 3D-AFM probe |
| Zusammenfassung | This paper presents an overview on recent research progress achieved at PTB for reference 3D nanometrology: (1) development of a new low noise 3D-AFM, which has combined measurement modes of CD-AFM and tilting-AFM in one instrument; (2) accurate calibration of the tip form with a new trace-ability route using the silicon lattice parameter which is suggested by the Mise en pratique for the realisation of the Metre in nanometrology; (3) development of a novel true 3D AFM probe, referred to as a 3D-Nanoprobe, which has quasi-isotropic stiffness in three directions and is thus more powerful for detecting 3D tip-sample interaction forces in AFM measurements. |
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