| Zugriffsnummer | 50445 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Characterization of the maximum measurable slope of optical topography measuring instruments |
| Autor(in); Institution |
Gao, Sai; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Wyss, Silvana; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Optical Measurement Systems for Industrial Inspection XIII:(2023), 126182L-1 - 126182L-7 |
| Artikelnummer | 126182L |
| Schriftenreihe | Proceedings of SPIE: 12618 |
| ISSN | 0277-786X (print) ; 1996-756x (online) |
| ISBN | 978-1-5106-6445-6 (print) ; 978-1-5106-6446-3 (online) |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | SPIE Optical Metrology 2023, München, 26-29, June, 2023, Germany |
| Freie Schlagworte | optical topography measuring instruments ; 3D optical microscope ; laser scanning confocal microscope ; maximum measurable slope ; optically smooth spheres ; sphere radius measurements |
| Zusammenfassung | The maximum slope that a microscope objective can measure is an important parameter characterizing the measurement capability of 3D optical microscopes. It is one of the most important criteria for selection of appropriate optical topography measuring instruments for areal surface texture measurements and the setting as well. In this article, a method is proposed using optically smooth spheres for characterization of the maximum measurable slope by optical topography measuring instruments with different objectives. The material measure and the measurement procedure are described and the method for the calculation of the measured sphere radius, the maximum measurable local slopes and characterization of the homogeneity of the slope transfer function within the FOV of the objective measured by a confocal microscope are presented. |
| Forschungsprojekt | 20IND07: TracOptic: Traceable industrial 3D roughness and dimensional measurement using optical 3D microscopy and optical distance sensors |
| Förderinformationen (1) |
Förderername: European Commission (EC)
Förderer ID: 0000 0001 2242 8989 Förderer ID Typ: ISNI Förderprogramm: EMPIR 2020 Industry Titel der Förderung: 20IND07: TracOptic: Traceable industrial 3D roughness and dimensional measurement using optical 3D microscopy and optical distance sensors Förderungsnummer: 20IND07 |