| Zugriffsnummer | 49779 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Nanoform evaluation approach using Mueller matrix microscopy and machine learning concepts |
| Autor(in); Institution |
Käseberg, Tim; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Grundmann, Jana; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
|
| Quelle/Jahr | EPJ Web of Conferences: 266 (2022), 2 S. |
| Artikelnummer | 10007 |
| Availability | [online only] |
| ISSN | 2100-014X (online) |
| DOI | |
| Verlag | Les Ulis: EDP Sciences |
| Konferenzangaben | The European Optical Society Annual Meeting (EOSAM2022), Porto, 12-16, September, 2022, Portugal |
| Zusammenfassung | We realized a Mueller matrix microscope for nanostructure characterization. For investigations on nanoform characterization via Mueller matrix images, we measured and simulated Mueller matrix images of specially designed nanostructures. As an approach towards machine learning evaluation in imaging ellipsometry, we calculated Haar-like features of the images and observed a higher sensitivity to subwavelength features in off-diagonal matrix elements compared to microscopy. |
| Kostenfreier Zugang | Open Access Gold |
| Rechteinformation | CC BY 4.0 ; Creative Commons Attribution 4.0 License |
| Themenbereich der Metrologie | Nanometrologie |
| Forschungsprojekt | 20FUN02: POLight: Pushing boundaries of nano-dimensional metrology by light |
| Förderinformationen (1) |
Förderername: European Commission (EC)
Förderer ID: 0000 0001 2242 8989 Förderer ID Typ: ISNI Förderprogramm: EMPIR 2020 Fundamental Titel der Förderung: 20FUN02: POLight: Pushing boundaries of nano-dimensional metrology by light Förderungsnummer: 20FUN02 URI der Förderung: https://www.ptb.de/empir2021/polight/home/ |