| Zugriffsnummer | 49773 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Reconstructing phase aberrations for high-precision dimensional microscopy |
| Autor(in); Institution |
Schneider, Philipp-Immanuel; JCMwave GmbH, Berlin, GERMANY; Zuse Institute Berlin, Berlin, GERMANY
Manley, Phillip; JCMwave GmbH, Berlin, GERMANY
Zschiedrich, Lin; JCMwave GmbH, Berlin, GERMANY; Zuse Institute Berlin, Berlin, GERMANY
König, Rainer; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Burger, Sven; JCMwave GmbH, Berlin, GERMANY; Zuse Institute Berlin, Berlin, GERMANY
|
| Quelle/Jahr | Optics and Photonics for Advanced Dimensional Metrology II:(2022), 1 - 8 |
| Artikelnummer | 121370I |
| Schriftenreihe | Proceedings of SPIE: 12137 |
| ISSN | 0277-786X |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | SPIE Photonics Europe, Straßbourg, 03, April - 23, May, 2022, France |
| Zusammenfassung | In many industrial sectors, dimensional microscopy enables non-destructive and rapid inspection of manufacturing processes. However, wave-optical effects and imaging errors of the optical system limit the accuracy. With modelbased approaches it is possible to measure the physical position of edges and corners with submicron uncertainty. This requires an accurate model for phase aberrations of the optical system. We present a method to model and quantify those phase aberrations by an efficient inverse measurement. |
| Themenbereich der Metrologie | Nanometrologie |
| Forschungsprojekt | Sim4dim |
| Förderinformationen (1) |
Förderername: Bundesministerium für Bildung und Forschung (BMBF)
Förderer ID: 0000 0000 9090 0344 Förderer ID Typ: ISNI Förderprogramm: Sim4Dim Förderungsnummer: Grant No. 01 IS 20 080 |
Zitierung
Schneider, P.-I., Manley, P., Krüger, J., Zschiedrich, L., König, R., Bodermann, B., & Burger, S. (2022). Reconstructing phase aberrations for high-precision dimensional microscopy. SPIE Photonics Europe, Straßbourg, 03, April - 23, May, 2022, France. https://doi.org/10.1117/12.2620762