| Datensatz noch nicht abgeschlossen | |
| Zugriffsnummer | 49249 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Positioning of piezo scanners using capacitance displacement sensors |
| Autor(in); Institution |
Zhao, Xianbin; 5.13, Mikrostrukturmeßsysteme, PTB-Braunschweig
Wilkening, Günter; 5.1, Mikrometrologie, PTB-Braunschweig
Horn, K.
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| Quelle/Jahr | Ultraprecision in manufacturing engineering : proceedings of the 3rd International Conference on Ultraprecision in Manufacturing Engineering, May 1994, Aachen, Germany:(1994), 386 - 389 |
| ISBN | 3-926832-11-8 (PRINT) |
| Verlag | Duisburg: Rhiem |
| Konferenzangaben | Ultraprecision in manufacturing engineering : proceedings of the 3rd International Conference on Ultraprecision in Manufacturing Engineering, May 1994, Aachen, Germany, Aachen, May, 1994, Germany |
Zitierung
Zhao, X., Wilkening, G., & Horn, K. (1994). Positioning of piezo scanners using capacitance displacement sensors. Ultraprecision in manufacturing engineering : proceedings of the 3rd International Conference on Ultraprecision in Manufacturing Engineering, May 1994, Aachen, Germany, Aachen, May, 1994, Germany.