| Zugriffsnummer | 48679 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Time stability characterization of quadrupole mass spectrometers |
| Autor(in); Institution |
Elkatmis, A.; TÜBİTAK UME National Metrology Institute, Gebze, TURKEY
Kangi, R.; TÜBİTAK UME National Metrology Institute, Gebze, TURKEY
Becker, Ute; 7.5, Wärme und Vakuum, PTB-Berlin
Jousten, Karl; 7.5, Wärme und Vakuum, PTB-Berlin
Mari, D.; Istituto Nazionale di Ricerca Metrologica (INRIM), Torino, ITALY
Boineau, D.; Laboratoire national de métrologie et d'essais (LNE), Paris, FRANCE
Vicar, M.; Czech Metrology Institute, (CMI), Brno, CZECH REPUBLIC
Ruiz, S.; Centro Español de Metrología, (CEM), Madrid, SPAIN
Setina, J.; Institute of Metals and Technology, (IMT), Ljubljana, SLOVENIA
|
| Quelle/Jahr | Measurement: 165 (2020) |
| ISSN | 0263-2241 (PRINT) ; 1873-412X (ONLINE) |
| DOI | |
| Verlag | Science Direct |
| Freie Schlagworte | Quadrupole mass spectrometer ; Time stability ; Sensitivity ; Mass number stability ; Mass resolution ; Secondary electron multiplier ; Minimum detectable partial pressure |
| Zusammenfassung | This study focuses on the time stability of different metrological characteristics of quadrupole mass spectrometers (QMSs). Investigated parameters were the sensitivity, when using a Faraday cup as a detector, the peak position, the peak width, the gain of a secondary electron multiplier, and the minimum detectable partial pressure. Eight different commercial QMSs were investigated at seven national metrology institutes under three different nominal calibration pressures of 5 × 10−6 Pa, 5 × 10−5 Pa, and 5 × 10−4 Pa for N2 and He. The measurements were carried out using a periodicity of approximately 3 months for a total duration of 2 years. Sensitivity calibrations were conducted either through a comparison method using calibrated ionization gauges or by applying a primary vacuum calibration system. In the case of ionization gauges, they were periodically recalibrated to ensure their stability and traceability to a primary pressure standard. |
