| Zugriffsnummer | 48282 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Low-cost, open-source XYZ nanopositioner for high-precision analytical applications |
| Autor(in); Institution |
Liao, Hsien-Shun; Department of Mechanical Engineering, National Taiwan University, Taipei, TAIWAN
Werner, Christian; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Slipets, Roman; Department of Health Technology, Technical University of Denmark, Lyngby, DENMARK
Larsen, Peter Emil; Department of Health Technology, Technical University of Denmark, Lyngby, DENMARK
Hwang, Ing-Shouh; Institute of Physics, Academia Sinica, Taipei, TAIWAN
Chang, Tien-Jen; Department of Health Technology, Technical University of Denmark, Lyngby, DENMARK
Danzebrink, Hans-Ulrich; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Huang, Kuang-Yuh; Department of Mechanical Engineering, National Taiwan University, Taipei, TAIWAN
Hwu, En-Te; Department of Health Technology, Technical University of Denmark, Lyngby, DENMARK
|
| Quelle/Jahr | HardwareX:(2022), 1 - 17 |
| Artikelnummer | e00317 |
| Availability | [online only] |
| ISSN | 2468-0672 (ONLINE) |
| DOI | |
| Verlag | Amsterdam: Elsevier |
| Freie Schlagworte | nanopositioning ; 3D printing ; atomic resolution ; vibrometer ; atomic force microskopy ; scanning electron microscopy |
| Zusammenfassung | Nanoscale positioning has numerous applications in both academia and industry. A growing number of applications require devices with long working distances and nanoscale resolutions. Friction-inertia piezoelectric positioners, which are based on the stick–slip mechanism, achieve both nanometer resolution and centimeter-scale travel. However, the requirements of complex preload mechanism, precision machining, and precise assembly increase the cost of conventional friction–inertia nanopositioners. Herein we present the design of an open-source XYZ-axis nanopositioning system. Utilizing a magnet-based stick-slip driving mechanism, the proposed XYZ nanopositioner provides several advantages, including sub-nanometer resolution, a payload capacity of up to 12 kg (horizontal), compact size, low cost, and easy assembly; furthermore, the system is adjustment-free. The performance tests validate the precision of the system in both scanning and stepping operation modes. Moreover, the resonant spectra affirm the rigidity and dynamic response of the mechanism. In addition, we demonstrate the practical applications of this nanopositioner in various measurement techniques, including scanning electron microscopy, vibrometry, and atomic force microscopy. Furthermore, we present 11 variations of the nanopositioner designs that are either compatible with ultra-high-vacuum systems and other existing systems, 3D printable, or hacking commercial linear slides. |
| Kostenfreier Zugang | Open Access Gold |
| Rechteinformation | CC BY 4.0 ; Creative Commons Attribution 4.0 License |
| Förderinformationen (1) |
Förderername: Danish National Research Foundation
Förderer ID: 0000 0004 0623 6209 Förderer ID Typ: ISNI Förderprogramm: DNRF122 |
| Förderinformationen (2) |
Förderername: BioInnovation Institute Foundation
Förderungsnummer: Grant No. NNF20SA006355 |
| Förderinformationen (3) |
Förderername: Villum Foundation
Förderer ID: 0000 0004 5905 9648 Förderer ID Typ: ISNI Förderungsnummer: Grant No. 9301 |
| Förderinformationen (4) |
Förderername: LEO Foundation
Förderer ID: 0000 0004 7866 5248 Förderer ID Typ: ISNI Förderungsnummer: LF-OC- 20-000370 |
Zitierung
Liao, H.-S., Werner, C., Slipets, R., Larsen, P. E., Hwang, I.-S., Chang, T.-J., Danzebrink, H.-U., Huang, K.-Y., & Hwu, E.-T. (2022). Low-cost, open-source XYZ nanopositioner for high-precision analytical applications. HardwareX, 1–17. https://doi.org/10.1016/j.ohx.2022.e00317