| Zugriffsnummer | 48232 |
| Dokumenttyp | Forschungsdaten |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Measurement and simulation data for "Optical form measurement employing a tiltable line scanning low coherence interferometer for annular subaperture stitching interferometry" |
| Autor(in); Institution |
Riebeling, Jörg; Universität Kassel, FB 16 Elektrotechnik/Informatik Messtechnik, Kassel, GERMANY
Ehret, Gerd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Lehmann, Peter; Universität Kassel, FB 16 Elektrotechnik/Informatik Messtechnik, Kassel, GERMANY
|
| Quelle/Jahr | (2021) |
| Availability | [Dataset] |
| DOI | |
| Verlag | PTB Open Access Repository |
| Freie Schlagworte | interferometry ; annular subaperture stitching ; aspherical optics ; form measurement ; path length modulation ; measurement uncertainty |
| Zusammenfassung | The provided data set and simulation software enables the immediate replication of the results presented in "Optical form measurement employing a tiltable line scanning low coherence interferometer for annular subaperture stitching interferometry." The research data are structured with respect to the figures presented in the contribution. Each subfolder contains all necessary measurement or simulation data to receive the figure from the contribution by running a MATLAB file. Therefore, it is possible to compare the results with full context to those presented in the contribution. The simulations demonstrate the transition of radial displacement uncertainties in an annular subaperture stitching interferometer through surface stitching algorithms to the topography result. The comparison of the simulation and measurement results indicates, that the radial displacement errors are the dominant source of topography deviations. By modelling of the radial displacement errors an estimate of the expanded uncertainty of the surface form measurement may be received. |
| Relation |
https://doi.org/10.1088/1361-6501/abfe83 – (Zeitschriftenartikel: 2021 Meas. Sci. Technol. 32 105107 (AN 46027))
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| Kostenfreier Zugang | Freier Zugang |
| Rechteinformation | CC BY 4.0 ; Creative Commons Attribution 4.0 License |
| Themenbereich der Metrologie | Länge, dimensionelle Metrologie |
| Forschungsprojekt | DFG Förderung Interferometrischer Zeilensensor Award Nos. LE 992/7-2 and EH 400/4-2 |
| Förderinformationen (1) |
Förderername: Deutsche Forschungsgemeinschaft (DFG)
Förderer ID: 0000 0001 2096 9829 Förderer ID Typ: ISNI Titel der Förderung: (LE 992/7-2, EH 400/4-2) Formmessung an Präzisionsbauteilen mit einem dynamisch nachgeführten interferometrischen Zeilensensor |
Zitierung
Schake, M., Riebeling, J., Ehret, G., & Lehmann, P. (2021). Measurement and simulation data for "Optical form measurement employing a tiltable line scanning low coherence interferometer for annular subaperture stitching interferometry" [Data set]. PTB Open Access Repository. https://doi.org/10.7795/710.20210414