Peiner, Erwin; TU Braunschweig, Institute of Semiconductor Technology (IHT), Braunschweig, GERMANY ; Laboratory for Emerging Nanometrology (LENA), Braunschweig, GERMANY
Given their superior dynamics, microprobes represent promising probe candidates for high-speed roughness measurement applications. Their disadvantage, however, lies in the fact that the volume of the microprobe’s silicon tip decreases dramatically during roughness measurement, and the unstable tip geometry leads to an increase in measurement uncertainty. To investigate the factors that influence tip geometry variation during roughness measurement, a rectangular-shaped tip characterizer was employed to characterize the tip geometry, and a method for reconstructing the tip geometry from the measured profile was introduced. Experiments were conducted to explore the ways in which the tip geometry is influenced by tip wear, probing force, and the relative movement of the tip with respect to the sample. The results indicate that tip fracture and not tip wear is the main reason for tip volume loss, and that the lateral dynamic load on the tip during scanning mode is responsible for more tip fracture than are other factors.
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Open Access Gold
Rechteinformation
CC BY 4.0 ; Creative Commons Attribution 4.0 License
Themenbereich der Metrologie
Länge, dimensionelle Metrologie
Forschungsprojekt
17IND05: MicroProbes: Multifunctional ultrafast microprobes for on-the-machine measurements
Förderinformationen (1)
Förderername: European Commission (EC)
Förderer ID: 0000 0001 2242 8989
Förderer ID Typ: ISNI
Förderprogramm: EMPIR 2017 Industry
Titel der Förderung: 17IND05: MicroProbes: Multifunctional ultrafast microprobes for on-the-machine measurements
Förderungsnummer: 17IND05
Zitierung
Xu, M., Zhou, Z., Ahbe, T., Peiner, E., & Brand, U. (2022). Using a tip characterizer to investigate microprobe silicon tip geometry variation in roughness measurements. Sensors, 22(03), 1–15. https://doi.org/10.3390/s22031298
