| Datensatz noch nicht abgeschlossen | |
| Zugriffsnummer | 47338 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Linewidth measurement on photomasks using optical image-share microscopy |
| Autor(in); Institution |
Downs, M. J.; PTB-Braunschweig
Turner, N. P.; PTB-Braunschweig
King, R. J.; PTB-Braunschweig
Horsfield, A.; PTB-Braunschweig
|
| Quelle/Jahr | PTB-Mitteilungen: 94 (1984), 4, 235 - 238 |
| ISSN | 0030-834X (PRINT) |
| Verlag | Braunschweig: Vieweg |
| Zusammenfassung | An account of the use of image-share microscopy for the measurement of linewidths on photomasks used in the microelectronics industry is presented. The application of TV image display and special intensity profiling electronics enables linewidths down to 1μm to be measured to better than ± 0.1 μm. The NPL chrome-on-glass linewidth transfer standard, for calibrating industrial quality control microscopes, is also described. |
