| Zugriffsnummer | 47262 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Development of a metrological reference system for the form measurement of aspheres and freeform surfaces based on a tilted-wave interferometer |
| Autor(in); Institution |
Fortmeier, Ines; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Stavridis, Manuel; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Schulz, Michael; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Elster, Clemens; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
|
| Quelle/Jahr | Measurement Science and Technology: 33 (2022), 4, 1 - 11 |
| Artikelnummer | 045013 |
| ISSN | 0957-0233 (PRINT) ; 1361-6501 (ONLINE) |
| DOI | |
| Verlag | Bristol: IOP Publishing |
| Freie Schlagworte | metrology ; aspheres ; freeform surfaces ; reference measurement system ; interferometry ; form measurement |
| Zusammenfassung | Aspheres and freeform surfaces play an important role in today's optics industry. However, the measurement of such complex surfaces is still challenging even with state-of-the-art manufacturing technology, and there is an urgent need in industry for a non-contact, highly accurate reference measurement technique. To meet this demand, at PTB, a metrological reference system for the contact-free form measurement of aspheres and freeform surfaces is under development. The measurement system is based on a tilted-wave interferometer. Advances in computational capabilities have made it possible to solve the complex inverse problems associated with this measurement system and to develop sophisticated analysis procedures for reconstructing the surface under test from the measured interferogram data. In this paper, we will present the status of the tilted-wave interferometer-based measurement system at PTB, describe the analysis procedures we have designed and show initial measurement results. The benefit of the implementation presented here is that it allows insight to be gained into the performance of the measurement system and enables traceable measurements to be established with low uncertainty. |
| Kostenfreier Zugang | Open Access Hybrid |
| Rechteinformation | CC BY 4.0 ; Creative Commons Attribution 4.0 License |
| Themenbereich der Metrologie | Länge, dimensionelle Metrologie |
Zitierung
Fortmeier, I., Stavridis, M., Schulz, M., & Elster, C. (2022). Development of a metrological reference system for the form measurement of aspheres and freeform surfaces based on a tilted-wave interferometer. Measurement Science and Technology, 33(4), 1–11. https://doi.org/10.1088/1361-6501/ac47bd