| Zugriffsnummer | 47144 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering |
| Autor(in); Institution |
Fernández Herrero, Analía; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Pflüger, Mika; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Puls, Jana; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Scholze, Frank; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Soltwisch, Victor; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
|
| Quelle/Jahr | Optics Express: 29 (2021), 22, 35580 - 35591 |
| Availability | [online only] |
| ISSN | 1094-4087 |
| DOI | |
| Verlag | Washington: OSA |
| Zusammenfassung | Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive manner. EUV scatterometry is investigated for the characterization of nanostructured surfaces and compared to grazing-incidence small-angle X-ray scattering (GISAXS). The reconstruction is based on a rigorous simulation using a Maxwell solver based on finite-elements and is statistically validated with a Markov-Chain-Monte-Carlo sampling method. It is shown that in comparison to GISAXS, EUV allows to probe smaller areas and to reduce the computation times obtaining comparable uncertainties. |
| Kostenfreier Zugang | Open Access Gold |
| Rechteinformation | under the terms of the OSA Access Publishing Agreement |
| Themenbereich der Metrologie | Photometrie und Radiometrie |
Zitierung
Fernández Herrero, A., Pflüger, M., Puls, J., Scholze, F., & Soltwisch, V. (2021). Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering. Optics Express, 29(22), 35580–35591. https://doi.org/10.1364/oe.430416