| Zugriffsnummer | 47142 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Identifying the type of line edge roughness using grazing-incidence x-ray fluorescence |
| Autor(in); Institution |
Salami, Zanyar; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Fernández Herrero, Analía; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Andrle, Anna; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Hönicke, Philipp; 7.2, Röntgenmesstechnik mit Synchrotronstrahlung, PTB-Berlin
Soltwisch, Victor; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
|
| Quelle/Jahr | Modeling Aspects in Optical Metrology VIII:(2021), 1178307-1 - 1178307-8 |
| Artikelnummer | 1178307 |
| Schriftenreihe | Proceedings of SPIE: 1178307 |
| Herausgeber(in) |
Bodermann, Bernd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Frenner, Karsten
|
| ISSN | 0277-786X (PRINT) ; 1996-756X (ONLINE) |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | SPIE Optical Metrology, Virtual Conference, 21. Juni 2021 |
| Freie Schlagworte | Line edge roughness ; Line width roughness ; Nanostructures ; X-ray fluorescence spectroscopy ; X-rays Oxides Scatterometry ; Finite element methods ; Grazing incidence |
| Zusammenfassung | The increasing complexity and decreasing sizes of nanostructures in microelectronic devices challenge the existing metrology methods. Moreover, as the dimensions of nanostructures continue to decrease, the overall effect of imperfections increases. For lithographic lamellar gratings, the most characteristic type of roughness is lineedge roughness, which affects the uniformity of the line edge of the line. Grazing incidence X-Ray fluorescence (GIXRF) is a non-destructive, ensemble and element sensitive method with high sensitivity to the line shapes of lamellar nanostructures. However, the effect of line-edge roughness on the angular distribution of the GIXRF is unknown. Here, the effect of line-edge roughness of lamellar gratings on the GIXRF intensity is investigated using a series of test samples with different artificial line-edge roughness profiles. We observed that the angular distribution of the GIXRF intensity is affected by the roughness. |
| Themenbereich der Metrologie | Photometrie und Radiometrie |