| Zugriffsnummer | 47110 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Non-contact, automated adjustment procedure for capacitive displacement sensors |
| Autor(in); Institution |
Daul, Lars; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Busch, Ingo; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Koenders, Ludger; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Wolff, Helmut; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Meess, Rudolf; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Tao, Jin; University of Shanghai for Science and Technology (USST), Yangpu District, Shanghai, CHINA
|
| Quelle/Jahr | Measurement Science and Technology: 33 (2021), 1, 1 - 11 |
| Artikelnummer | 014004 |
| ISSN | 0957-0233 (PRINT) ; 1361-6501 (ONLINE) |
| DOI | |
| Verlag | Bristol: IOP Publishing |
| Konferenzangaben | 20th International Metrology Congress (CIM21), Lyon, 07-09, September, 2021, France |
| Freie Schlagworte | Capacitive sensors ; Displacement measurements ; Slope error ; Nonlinearity ; Adjustment |
| Zusammenfassung | Capacitive sensors enable non-contact displacement measurements in the micrometer range with sub-nanometer resolution. To achieve this, a proper alignment of capacitive sensors is necessary. In this work, a non-contact, automated and intrinsic adjustment procedure is presented which is based on determining the extrema of slope error and nonlinearity. After the final adjustment step, the remaining tilt is less than 1.5 mrad. A measurement routine is used to evaluate the adjustment procedure by applying tilt around the final adjustment position and measuring the global slope error and the global nonlinearity. The combination of adjustment procedure and measurement routine enables the investigation of capacitive displacement sensors with higher accuracy in order to establish a comprehensive uncertainty budget and to explore improvements in capacitive sensor technology. |
| Kostenfreier Zugang | Open Access Hybrid |
| Rechteinformation | CC BY 4.0 ; Creative Commons Attribution 4.0 License |
| Themenbereich der Metrologie | Nanometrologie |
| Forschungsprojekt | DFG, GZ: KO1483/5-1 CDZ, GZ: 1287 |
| Förderinformationen (1) |
Förderername: Deutsche Forschungsgemeinschaft (DFG)
Förderer ID: 0000 0001 2096 9829 Förderer ID Typ: ISNI Förderprogramm: KO1483/5-1 Förderungsnummer: 1287 |