| Zugriffsnummer | 46282 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | A new type of nanoscale reference grating manufactured by combined laser-focused atomic deposition and x-ray interference lithography and its use for calibrating a scanning electron microscope |
| Autor(in); Institution |
Deng, Xiao; School of Physics Science and Engineering, Tongji University, Shanghai, CHINA
Dai, Gaoliang; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Liu, Jie; School of Physics Science and Engineering, Tongji University, Shanghai, CHINA
Hu, Xiukun; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Bergmann, Detlef; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Zhao, Jun; Shanghai Advanced Research Institute, Chinese Academy of Sciences, CHINA
Tai, Renzhong; Shanghai Advanced Research Institute, Chinese Academy of Sciences, CHINA
Cai, Xiaoyu; Shanghai Institute of Measurement and Testing Technology, Shanghai, CHINA
|
| Quelle/Jahr | Ultramicroscopy: 226 (2021), 1 - 5 |
| Artikelnummer | 113293 |
| ISSN | 0304-3991 |
| DOI | |
| URL | |
| Verlag | Amsterdam: Elsevier |
| Freie Schlagworte | Scanning electron microscopy ; Metrological atomic force microscopy ; Field distortion ; Magnification ; Calibration ; Lateral standards |
| Zusammenfassung | Calibration of magnification and nonlinearity of scanning electron microscopy (SEM) is an essential task. In this paper, we proposed a new type of 1D grating sample fabricated by combining laser-focused atomic deposition and x-ray interference lithography as a lateral standard for calibrating SEMs. The calibrations of the grating pattern by a metrological large-range atomic force microscope indicate that the grating sample exhibits outstanding pattern uniformity that surpasses conventional samples fabricated by e-beam lithography: (1) the nonlinear deviation of the grating structures is below +/- 0.5 nm over a measurement range of 5 µm; (2) the maximal variation of the calibrated mean pitch values is lower than 0.01 nm at different locations randomly selected all over the pattern area. The proposed new sample is applied for accurately calibrating the magnification and nonlinearity of a commercial SEM, showing its advantages of easy-of-use and high accuracy. The influence of the defocus level of SEM on the calibration result is also demonstrated. This research offers a feasible solution for highly accurate SEM calibration needed for 3D nanometrology and hybrid metrology demanded in metrology of modern nanoelectronics devices and systems. |
Zitierung
Deng, X., Dai, G., Liu, J., Hu, X., Bergmann, D., Zhao, J., Tai, R., & Cai, X. (2021). A new type of nanoscale reference grating manufactured by combined laser-focused atomic deposition and x-ray interference lithography and its use for calibrating a scanning electron microscope. Ultramicroscopy, 226, 1–5. https://doi.org/10.1016/j.ultramic.2021.113293