| Zugriffsnummer | 46221 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Design and manufacturing of deterministically micro-structured plates for capacitive sensors |
| Autor(in); Institution |
Meeß, Rudolf; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Daul, Lars; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Verhülsdonk, Stefan; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 21st International Conference of the European Society for Precision Engineering and Nanotechnology June 7th - 10th June 2021, Virtual Conference:(2021), 409 - 410 |
| Artikelnummer | P6.16 |
| Herausgeber(in) |
Leach, R. K.
|
| ISBN | 978-0-9957751-9-0 |
| Verlag | Northampton: twenty10 |
| Konferenzangaben | 21st International Conference of the European Society for Precision Engineering and Nanotechnology, Virtual Conference, 7-10, June, 2021 |
| Freie Schlagworte | Manufacturing ; Ultra-precision ; Design ; Microstructure ; Capacitive sensor |
| Zusammenfassung | Capacitive sensors are proven tools for high-resolution and high-precision distance measurements. Besides the properties and functionality of the electrical unit, the form deviations of the sensing surfaces, their alignment errors and the surface microtopography of these electrically charged surfaces influence the resolution and the precision of measurements. In this study, different deterministic microtopographies of sensing elements are simulated, manufactured and tested in a purpose-built setup. Aluminium plate electrodes with surrounding guard rings are manufactured with single-crystal diamond tools. The deterministic average roughness Sa is varied in the range of 74 nm to 626 nm. Furthermore, the experimental results are compared to the results of computational Finite Element Analysis (FEA). |
| Themenbereich der Metrologie | Länge, dimensionelle Metrologie |
Zitierung
Meeß, R., Daul, L., & Verhülsdonk, S. (2021). Design and manufacturing of deterministically micro-structured plates for capacitive sensors. 21st International Conference of the European Society for Precision Engineering and Nanotechnology, Virtual Conference, 7-10, June, 2021.