| Zugriffsnummer | 45841 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Development of a combined XRF/XPS surface-analysis system for the surface-layer quantification of 28Si spheres |
| Autor(in); Institution |
Wu, Yu-Hsin; Center for Measurement Standards, Industrial Technology Research Institute, Hsinchu, TAIWAN
Tsao, Lin; Center for Measurement Standards, Industrial Technology Research Institute, Hsinchu, TAIWAN
Chiu, Jeng-Yu; Center for Measurement Standards, Industrial Technology Research Institute, Hsinchu, TAIWAN
Chen, Sheng-Jui; Center for Measurement Standards, Industrial Technology Research Institute, Hsinchu, TAIWAN
Kolbe, Michael; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Fliegauf, Rolf; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Beyer, Edyta; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Härtig, Frank; Präsidium, VP, PTB-Braunschweig
|
| Quelle/Jahr | Acta IMEKO: 10 (2021), 1, 290 - 294 |
| ISSN | 2221-870X |
| DOI | |
| Verlag | Braunschweig: IMEKO |
| Freie Schlagworte | XRCD ; Si sphere ; XPS ; XRF |
| Zusammenfassung | To achieve a new kilogram definition using the X-ray crystal density method, the Center for Measurement Standards, Industrial Technology Research Institute in Taiwan has established the combined XRF (X-ray fluorescence)/XPS (X-ray photoelectron spectroscopy) surface analysis system for the quantitative surface-layer analysis of Si spheres. The surface layer of a Si sphere is composed primarily of an oxide layer, carbonaceous contamination and physisorbed/chemisorbed water. This newly combined instrument has been implemented to measure the XRF for the direct determination of the mass deposition of oxygen (ng/cm2) with a calibrated silicon drift detector and the XPS for the ratio between the elements (O, Si, C) and composition identification. These two complementary methods of X-ray metrology allow an accurate determination of the surface-layer mass of the Si sphere. In this paper, the construction of a combined XRF/XPS surface-analysis system is reported, including the surface characterisation method, the assembly of parts of the load-lock chamber and ultra-high-vacuum analysis chamber, the vacuum-system design, hardware integration and the intended research on surface-layer measurement. It is anticipated that the measured surface-layer mass will be combined with the core mass of the Si sphere. |
| Kostenfreier Zugang | Open Access Gold |
| Rechteinformation | CC BY 4.0 ; Creative Commons Attribution 4.0 License |
| Themenbereich der Metrologie | Photometrie und Radiometrie |
Zitierung
Wu, Y.-H., Tsao, L., Chiu, J.-Y., Chen, S.-J., Kolbe, M., Fliegauf, R., Beyer, E., & Härtig, F. (2021). Development of a combined XRF/XPS surface-analysis system for the surface-layer quantification of 28Si spheres. Acta IMEKO, 10(1), 290–294. http://doi.org/10.21014/acta_imeko.v10i1.877