| Zugriffsnummer | 45829 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Interferometrical device for the in-process measurement of diameter variation for the manufacturing of ultraprecise spheres |
| Autor(in); Institution |
Meeß, Rudolf; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Dontsov, Denis; SIOS Meßtechnik GmbH, Ilmenau, GERMANY
Langlotz, Enrico; SIOS Meßtechnik GmbH, Ilmenau, GERMANY
|
| Quelle/Jahr | Measurement Science and Technology: 32 (2021), 7, Spec. Iss., 1 - 10 |
| ISSN | 0957-0233 (PRINT) ; 1361-6501 (ONLINE) |
| DOI | |
| Verlag | Bristol: IOP Publishing |
| Freie Schlagworte | in-line measurement ; non-contact measuring system ; dimensional metrology for process optimization |
| Zusammenfassung | A novel device is presented which is designed for in-process measurements of the variation of the diameter of highly reflective spheres. Silicon spheres have been used for the new definition of the SI. A large number of spheres have to be processed, and the form of the objects, and thus the manufacturing process's stability, needs to be controlled every day. Commercially available measurement equipment and even state-of-the-art spherical interferometers have reached their limits concerning resolution, uncertainty, the complex handling routines, measurement time and even financial investment. A novel setup has thus been designed after considering and selecting a special mechanical setup with a very small measurement loop, stable optical sensors and a handling strategy which avoids collision and contact with the very valuable, superpolished spherical objects. Thus, the design minimizes the influence of the environment and reduces the measurement time of an equator with sub-nanometre resolution down to three minutes. In addition, the analysis time has fallen to less than a minute. |
| Kostenfreier Zugang | Open Access Hybrid |
| Rechteinformation | CC BY 4.0 ; Creative Commons Attribution 4.0 License |
| Themenbereich der Metrologie | Länge, dimensionelle Metrologie |
Zitierung
Meeß, R., Dontsov, D., & Langlotz, E. (2021). Interferometrical device for the in-process measurement of diameter variation for the manufacturing of ultraprecise spheres. Measurement Science and Technology, 32(7, Spec. Iss.), 1–10. https://doi.org/10.1088/1361-6501/abe81c