| Zugriffsnummer | 45294 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Grazing incidence-X-ray fluorescence for a dimensional and compositional characterization of well-ordered 2D and 3D nanostructures |
| Autor(in); Institution |
Hönicke, Philipp; 7.2, Röntgenmesstechnik mit Synchrotronstrahlung, PTB-Berlin
Andrle, Anna; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Kayser, Yves; 7.2, Röntgenmesstechnik mit Synchrotronstrahlung, PTB-Berlin
Nikolaev, Konstantin V; 7.2, Röntgenmesstechnik mit Synchrotronstrahlung, PTB-Berlin
Probst, Jürgen; Helmholtz-Zentrum Berlin (HZB), Berlin, GERMANY
Scholze, Frank; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Soltwisch, Victor; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Weimann, Thomas; 2.4, Quantenelektronik, PTB-Braunschweig
Beckhoff, Burkhard; 7.2, Röntgenmesstechnik mit Synchrotronstrahlung, PTB-Berlin
|
| Quelle/Jahr | Nanotechnology: 31 (2020), 50, 8 S. |
| Artikelnummer | 505709 |
| ISSN | 0957-4484 (PRINT) ; 1361-6528 (ONLINE) |
| DOI | |
| Verlag | Bristol: IOP Publishing Ltd |
| Zusammenfassung | The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a dimensional reconstruction of nanostructures and a characterization (ideally a quantitative characterization) of their composition is required. In this work, we present a soft x-ray fluorescence-based methodology that allows both of these requirements to be addressed at the same time. By applying the grazing-incidence x-ray fluorescence technique and thus utilizing the x-ray standing wave field effect, nanostructures can be investigated with a high sensitivity with respect to their dimensional and compositional characteristics. By varying the incident angles of the exciting radiation, element-sensitive fluorescence radiation is emitted from different regions inside the nanoobjects. By applying an adequate modeling scheme, these datasets can be used to determine the nanostructure characteristics. We demonstrate these capabilities by performing an element-sensitive reconstruction of a lamellar grating made of Si3N4, where GIXRF data for the O-Kα and N-Kα fluorescence emission allows a thin oxide layer to be reconstructed on the surface of the grating structure. In addition, we employ the technique also to three dimensional nanostructures and derive both dimensional and compositional parameters in a quantitative manner. |
| Themenbereich der Metrologie | Photometrie und Radiometrie |
Zitierung
Hönicke, P., Andrle, A., Kayser, Y., Nikolaev, K. V., Probst, J., Scholze, F., Soltwisch, V., Weimann, T., & Beckhoff, B. (2020). Grazing incidence-X-ray fluorescence for a dimensional and compositional characterization of well-ordered 2D and 3D nanostructures. Nanotechnology, 31(50), 8 S. https://doi.org/10.1088/1361-6528/abb557