| Zugriffsnummer | 45264 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Laboratory grazing-incidence X-ray fluorescence spectroscopy as an analytical tool for the investigation of sub-nanometer CrSc multilayer water window optics |
| Autor(in); Institution |
Szwedowski-Rammert, Veronika; Institute for Optics and atomic Physics, Technical University of Berlin, Berlin, GERMANY
Hönicke, Philipp; 7.2, Röntgenmesstechnik mit Synchrotronstrahlung, PTB-Berlin
Wu, Meiyi; Sorbonne Université, Paris, FRANCE
Waldschläger, Ulrich; Bruker Nano GmbH, Berlin, GERMANY
Gross, Armin; Bruker Nano GmbH, Berlin, GERMANY
Baumann, Jonas; Institute for Optics and atomic Physics, Technical University of Berlin, Berlin, GERMANY
Goetzke, Gesa; Institute for Optics and atomic Physics, Technical University of Berlin, Berlin, GERMANY
Delmotte, Franck; Institut d'Optique Graduate School, Paris, FRANCE
Meltchakov, Evgueni; Institut d'Optique Graduate School, Paris, FRANCE
Kanngießer, Birgit; Institute for Optics and atomic Physics, Technical University of Berlin, Berlin, GERMANY
Jonnard, Philippe; Sorbonne Université, Paris, FRANCE
Mantouvalou, Ioanna; Institute for Optics and atomic Physics, Technical University of Berlin, Berlin, GERMANY
|
| Quelle/Jahr | Spectrochimica Acta B: 174 (2020), 6 S. |
| Artikelnummer | 105995 |
| ISSN | 0584-8547 (PRINT) ; 1873-3565 (ONLINE) |
| DOI | |
| Verlag | Amsterdam: Elsevier |
| Zusammenfassung | Efficient multilayer optics for radiation in the water window range are difficult to manufacture due to extremely small layer thicknesses and severe intermixing of elements between the layers. Therefore, adequate analytics and short feedback loops are of utmost importance for manufacturers to improve performance and efficiency. We show the possibility for non-destructive elemental depth profiling with commercial laboratory equipment using four real-life CrSc multilayer samples. Comparative measurements at the laboratory of PTB at the synchrotron radiation facility BESSY II confirm the results and prove the potential of laboratory equipment for the reliable analysis of stratified materials with sub-nanometer layer thicknesses. |
| Themenbereich der Metrologie | Photometrie und Radiometrie |
Zitierung
Szwedowski-Rammert, V., Hönicke, P., Wu, M., Waldschläger, U., Gross, A., Baumann, J., Goetzke, G., Delmotte, F., Meltchakov, E., Kanngießer, B., Jonnard, P., & Mantouvalou, I. (2020). Laboratory grazing-incidence X-ray fluorescence spectroscopy as an analytical tool for the investigation of sub-nanometer CrSc multilayer water window optics. Spectrochimica Acta B, 174, 6 S. https://doi.org/10.1016/j.sab.2020.105995