| Zugriffsnummer | 45136 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | The lattice parameter of silicon: a secondary realisation of the metre |
| Autor(in); Institution |
Yacoot, Andrew; National Physical Laboratory, Teddington, Middelsex, UK
Bosse, Harald; 5, Fertigungsmesstechnik, PTB-Braunschweig
Dixson, Ron; National Institute of Standards and Technology, Gaithersburg, Maryland, USA
|
| Quelle/Jahr | Measurement Science and Technology: 31 (2020), 12, 1 - 18 |
| Artikelnummer | 121001 |
| ISSN | 0957-0233 (PRINT) ; 1361-6501 (ONLINE) |
| DOI | |
| Verlag | Bristol: IOP Publishing |
| Freie Schlagworte | silicon lattice parameter ; dimensional nanometrology ; raceability ; SI redefinition |
| Zusammenfassung | The 2019 revision of the International System of Units (SI) linked the seven base units to fundamental constants; only a minor rewording was necessary for the metre whose definition was already linked to the speed of light. However, the largest change in the metre realisation since 1983 occurred with the adoption of the lattice parameter of silicon as a secondary realisation of the metre to support dimensional nanometrology. The traceability of the d220 silicon lattice spacing has been established through combined optical and x-ray interferometry with a relative uncertainty of 1.67 x 10-8 and three routes to traceability via the silicon lattice spacing have been formally recognised in the Mise en Pratique for the metre. These are length measurement using x-ray interferometry (relying on the known value for the lattice spacing rather than using x-ray interferometry to measure the lattice spacing) counting atoms on linewidth structures using transmission electron microscopy and using monoatomic steps to calibrate scanning probe microscopes. This paper describes these routes and highlights the opportunities this new secondary realisation presents. |
| Themenbereich der Metrologie | Länge, dimensionelle Metrologie |