| Zugriffsnummer | 44958 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Validation of secondary fluorescence excitation in quantitative X-ray fluorescence analysis of thin alloy films |
| Autor(in); Institution |
Wählisch, André; 7.2, Röntgenmesstechnik mit Synchrotronstrahlung, PTB-Berlin
Streeck, Cornelia; 7.2, Röntgenmesstechnik mit Synchrotronstrahlung, PTB-Berlin
Hönicke, Philipp; 7.2, Röntgenmesstechnik mit Synchrotronstrahlung, PTB-Berlin
Beckhoff, Burkhard; 7.2, Röntgenmesstechnik mit Synchrotronstrahlung, PTB-Berlin
|
| Quelle/Jahr | Journal of Analytical Atomic Spectrometry: 35 (2020), 8, 1664 - 1670 |
| ISSN | 0267-9477 (PRINT) ; 1364-5544 (ONLINE) |
| DOI | |
| Verlag | London: Royal Society of Chemistry (RSC) |
| Zusammenfassung | X-ray fluorescence (XRF) analysis is a widely applied technique for the quantitative analysis of thin films up to the μm scale because of its non-destructive nature and because it is easily automated. When low uncertainties of the analytical results in the few percent range are required, the non-linear secondary fluorescence effect in multi-elemental samples may complicate an otherwise straightforward quantification, since it can easily exceed a relative contribution of 20%. The conventional solution, to rely on good performing reference samples, is hindered by their low availability, especially for thin film applications. To address this challenge, we demonstrate a flexible production method of multilayered, alloyed thin films with significant secondary fluorescence contributions. We use reference-free XRF analysis to validate the reliability of the physical model for secondary fluorescence, which includes a thorough uncertainty estimation. The investigated specimens are qualified as calibration samples for XRF or other quantitative analyses. |
| Themenbereich der Metrologie | Photometrie und Radiometrie |
Zitierung
Wählisch, A., Streeck, C., Hönicke, P., & Beckhoff, B. (2020). Validation of secondary fluorescence excitation in quantitative X-ray fluorescence analysis of thin alloy films. Journal of Analytical Atomic Spectrometry, 35(8), 1664–1670. https://doi.org/10.1039/d0ja00171f