| Zugriffsnummer | 44801 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Traceable calibration of Shack-Hartmann wavefront sensors employing spherical wavefronts |
| Autor(in); Institution |
Bautsch, Johannes; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Ehret, Gerd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Schake, Markus; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Berg, Ulrich; Optocraft GmbH, Erlangen, GERMANY
Pfund, Johannes; Optocraft GmbH, Erlangen, GERMANY
Wagner, Lorenz; Optocraft GmbH, Erlangen, GERMANY
Tutsch, Rainer; TU Braunschweig, Institut für Produktionsmesstechnik, Braunschweig, GERMANY
|
| Quelle/Jahr | Optical Engineering: 59 (2020), 8, 084104-1 - 084104-10 |
| ISSN | 0091-3286 (PRINT) ; 1560-2303 (ONLINE) |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Freie Schlagworte | Wavefront ; Wavefront sensor ; Calibration ; Measurement uncertainty ; Shack–Hartmann sensor |
| Zusammenfassung | Traceable, highly accurate calibration of wavefront sensors such as Shack–Hartmann sensors is a challenging task and an active field of research. We have developed a measurement system for the traceable calibration of wavefront sensors employing spherical wavefronts and a point light source in combination with a three-axis linear stage.We obtain an absolute calibration of sensor errors, including the reference spot position and wavefront gradient-dependent errors for each microlens individually. We discuss the main error influences and present an initial measurement uncertainty budget for the calibration. The calibration can be performed with an expanded measurement uncertainty (95% coverage interval) of better than 5 μrad for the wavefront gradient deviation. |
| Kostenfreier Zugang | Open Access Hybrid |
| Themenbereich der Metrologie | Länge, dimensionelle Metrologie |
Zitierung
Bautsch, J., Ehret, G., Schake, M., Berg, U., Pfund, J., Wagner, L., & Tutsch, R. (2020). Traceable calibration of Shack-Hartmann wavefront sensors employing spherical wavefronts. Optical Engineering, 59(8), 084104-1–084104-10. https://doi.org/10.1117/1.oe.59.8.084104