| Zugriffsnummer | 44770 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Annular subaperture stitching interferometry with planar reference wavefront for measurement of spherical and aspherical surfaces |
| Autor(in); Institution |
Schake, Markus; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Ehret, Gerd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings, Optical Technology and Measurement for Industrial Applications 2020: 11523 (2020), 34 - 38 |
| ISSN | 0277-786X ; 1996-756X (ONLINE) |
| ISBN | 978-1-5106-3853-2 ; 978-1-5106-3854-9 (PoD) |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | Optical Technology and Measurement for Industrial Applications 2020, Virtual Conference, 20-24, April, 2020, Japan |
| Freie Schlagworte | Aspheres ; form measurement ; interferometry ; annular subaperture stitching |
| Zusammenfassung | An interferometric line sensor in a Michelson configuration without a transmission sphere is employed for annular subaperture stitching interferometry to measure spherical and aspherical surfaces. The misalignments between the subapertures, which are caused by positioning error induced wavefront aberrations, are corrected employing a machine learning based Zernike polynomial fitting in the overlapping regions. |
| Themenbereich der Metrologie | Länge, dimensionelle Metrologie |
| Forschungsprojekt | Formmessung an Präzisionsbauteilen mit einem dynamisch nachgeführten interferometrischen Zeilensensor (LE 992/7-2, EH 400/4-2) |
Zitierung
Schake, M. & Ehret, G. (2020). Annular subaperture stitching interferometry with planar reference wavefront for measurement of spherical and aspherical surfaces. Optical Technology and Measurement for Industrial Applications 2020, Virtual Conference, 20-24, April, 2020, Japan. https://doi.org/10.1117/12.2574754