| Zugriffsnummer | 44747 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Peer Review | ohne Peer Review |
| Sprache | Englisch |
| Titel | Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements |
| Autor(in); Institution |
Krüger, Jan; 4.2, Bild- und Wellenoptik, PTB-Braunschweig; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Xu, Han; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Köning, Rainer; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Bodermann, Bernd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
|
| Quelle/Jahr | EPJ Web of Conferences: 238 (2020), 1 - 2 |
| Artikelnummer | 06010 |
| Availability | [online only] |
| ISSN | 2100-014X |
| DOI | |
| Verlag | Les Ulis: EDP Sciences |
| Konferenzangaben | European Optical Society Annual Meeting 2020 (virtual), Virtual Conference, 07-11, September, 2020 |
| Freie Schlagworte | UV- Microscopy ; Optical bidirectional measurements |
| Zusammenfassung | In this contribution, we emphasize the need for a sophisticated characterization of measurement devices in particular for optical bidirectional measurements. As an example, the ongoing characterization of the UV-microscope at PTB’s linescale comparator is presented. First results of spectroscopic measurements of the employed UV-LED are presented and the impact of deviations in the center wavelength of the LED on the measurements are illustrated by rigorous simulations. |
| Kostenfreier Zugang | Open Access Gold |
| Rechteinformation | CC BY 4.0 ; Creative Commons Attribution 4.0 License |
| Themenbereich der Metrologie | Nanometrologie |
| Forschungsprojekt | Flankierende Maßnahme der PTB (Abteilungen 4 und 5): Optische bidirektionale Messungen |
Zitierung
Krüger, J., Xu, H., Köning, R., & Bodermann, B. (2020). Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements. EPJ Web of Conferences, 238, 1–2. https://doi.org/10.1051/epjconf/202023806010