| Zugriffsnummer | 44744 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | A phase retrieval inspired approach for the determination of optical aberrations in microscopy |
| Autor(in); Institution |
Krüger, Jan; 4.2, Bild- und Wellenoptik, PTB-Braunschweig; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Köning, Rainer; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Bodermann, Bernd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
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| Quelle/Jahr | EUSPEN Conference Proceedings, 20th International Conference & Exhibition:(2020) |
| URL | |
| Konferenzangaben | euspen - 1st Virtual International Conference (originally: euspen - 20th International Conference and Exhibition, Geneva, Switzerland), Virtual Conference, 8-12, June, 2020 |
| Freie Schlagworte | Optical Aberrations ; Microscopy ; Phase Retrieval |
| Zusammenfassung | For accurate determination of bidirectional measurands, the PTB performs measurements, in the field of UV- microscopy, which are supported by an edge detection algorithm in order to give a precise statement about linewidths on photomasks for example. The algorithm is based on the rigorous calculation of the diffraction problem. Hence, all the parameters like the illumination and imaging parameters as well as the object itself must be considered due to their specific impact on the simulations. This work aims to further improve the edge detection by also including optical aberrations, in form of Zernike polynomials, into the underlying numerical calculations. Therefore, a particle swarm optimisation (PSO) method is developed in which the particles are evenly spread over the parameter space which is only expanded by the Zernike polynomials. The optimisation problem is the minimization of the difference between a given microscopic image, which is afflicted by the aberrations of a specific microscope and the simulated microscopic image. But like in a phase retrieval algorithm, the PSO does not only consider a given image in the focus plane but also given images in several off- focus planes since the influence of the Zernike polynomials is stronger there. Because the illumination, imaging and object parameters of the given and the simulated microscopic images are identical only a change of the Zernike polynomials is responsible for a minimization during an iteration of the PSO. First results show, that after enough iterations with sufficient particles, the difference between the images is very small. The for the minimum responsible particle then holds the Zernike polynomials which characterizes the used microscope in terms of its aberrations. From there on, the aberrations of this microscope are to be considered in the edge detection algorithm, too. |
| Themenbereich der Metrologie | Nanometrologie |
| Forschungsprojekt | Flankierende Maßnahme der PTB (Abteilungen 4 und 5): Optische bidirektionale Messungen |
Zitierung
Krüger, J., Köning, R., & Bodermann, B. (2020). A phase retrieval inspired approach for the determination of optical aberrations in microscopy. euspen - 1st Virtual International Conference (originally: euspen - 20th International Conference and Exhibition, Geneva, Switzerland), Virtual Conference, 8-12, June, 2020.