| Zugriffsnummer | 44580 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Measurement of groove depth standards in the range 1 μm up to 1 mm (EURAMET project 1407) |
| Autor(in); Institution |
Brand, Uwe; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Matus, Michael; Bundesamt für Eich- und Vermessungswesen (BEV), Wien, AUSTRIA
Carcedo, Laura; Centro Espanol de Metrologia, CEM, Madrid, SPAIN
Slusarski, Lukasz; Central Office of Measures, Samodzielne Laboratorium Dlugosci (Length Laboratory), Warszawa, POLAND
Picotto, Gian Bartolo; Istituto Nazionale di Ricerca Metrologica (INRIM),Torino, ITALY
Lassila, Antii; Centre for Metrology and Accreditation MIKES, Espoo, FINLAND
Hungwe, Faith; National Metrology Institute of South Africae, Pretoria, SOUTH AFRICA
Flys, Olena; Research Institutes of Sweden, Borås, SWEDEN
Aksulu, Murat; TUBITAK UME, Gebze, TURKEY
Kosteev, Vladimir; Russian Research Institute for Metrological, Moscow, RUSSIA
|
| Quelle/Jahr | Metrologia: 57 (2020), 1A, Tech. Suppl., 1 - 41 |
| Availability | [online only] |
| ISSN | 0026-1394 (PRINT) ; 1681-7575 (ONLINE) |
| DOI | |
| Verlag | Bristol: IOP Publishing |
| Freie Schlagworte | Etched silicon standards ; Trapezoidal ; Actual probing force ; Actual tip radius ; Tactile measuring devices |
| Zusammenfassung | A comparison measurement between 10 national metrology institutes on two types of depth setting standards was conducted using mostly tactile but also two optical instruments for measurement. Three etched silicon standards with depths of 5, 20 and 50 μm and one diamond turned nickel coated copper standard with depths of 200, 600 and 900 μm were measured. The cross section of the grooves was trapezoidal. Most of the participants confirmed their CMC entries. Since many measurements had to be made, contamination of the standards and heavy wear on the standards were also observed after the comparison was completed. The wear consists of indentation marks from stylus instruments on both types of standards and as many as 70 scratch marks on the nickel coated copper artefact used. This indicates that the contact pressure of the tactile measuring devices used by some partners was too high. This can be caused by a too high probing force or a too small probing tip radius. Thus, for future comparisons the actual probing force and actual tip radius need to be measured during the comparison by the participants to assure that the recommended values (2 μm tip radius and 0.7 mN probing force) are not exceeded. The recently published German standard DIN 32567-3 "Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices" describes methods to do both. |
| Kostenfreier Zugang | Freier Zugang |
| Themenbereich der Metrologie | Länge, dimensionelle Metrologie |
| Forschungsprojekt | EURAMET project 1407 (unfunded) |
Zitierung
Brand, U., Matus, M., Carcedo, L., Slusarski, L., Picotto, G. B., Lassila, A., Hungwe, F., Flys, O., Aksulu, M., & Kosteev, V. (2020). Measurement of groove depth standards in the range 1 μm up to 1 mm (EURAMET project 1407). Metrologia, 57(1A, Tech. Suppl.), 1–41. https://doi.org/10.1088/0026-1394/57/1a/04001