Zugriffsnummer 44543
Dokumenttyp Zeitschriftenartikel
Peer Review mit Peer Review
Sprache Englisch
Titel Influence of ion induced secondary electron emission on the stability of ionisation gauges
Autor(in); Institution
Figueiredo, I.; CEFITEC, Department of Physics, Faculty of Sciences and Technology, Nova University of Lisbon, Caparica, PORTUGAL
Bundaleski, N.; CEFITEC, Department of Physics, Faculty of Sciences and Technology, Nova University of Lisbon, Caparica, PORTUGAL
Teodoro, O.M.N.D.; CEFITEC, Department of Physics, Faculty of Sciences and Technology, Nova University of Lisbon, Caparica, PORTUGAL
Jousten, Karl; 7.5, Wärme und Vakuum, PTB-Berlin
Illgen, Claus; 7.5, Wärme und Vakuum, PTB-Berlin
Quelle/Jahr Vacuum: 184 (2021), 2, 9 S.
Artikelnummer 109907
ISSN 0042-207X (PRINT) ; 1879-2715 (ONLINE)
DOI
URL
Verlag Amsterdam [u.a.]: Elsevier
Freie Schlagworte ion induced secondary electron emission ; ionisation gauges ; XPS
Zusammenfassung Surface modification of different materials exposed to an environment typical for hot cathode ionisation gauges was investigated. Such environment has been generated in a setup which simulates conditions in a Bayard-Alpert ionisation gauge. Surface characterisations have been performed before and after the sample exposure to Ar and H2  gas discharges. The majority of studied materials, such as molybdenum, gold or stainless steel, are considered to be of interest as ion collectors. Experiments with copper and graphite revealed the major processes that are taking place during the exposure to an ionisation gauge environment. Since the stability of ionisation gauges can be affected by the change of secondary electron emission properties of ion collectors during the operation, electron yield induced by low energy Ar+  ions was measured. The first results show that exposure to ionisation gauge environment contributes to development of hydrocarbon layers, independently from the dominant species in the gas discharge. Therefore, ion induced secondary electron yield will be changing during the gauge operation and eventually reach saturation regardless of the collector material. The results also show that the hydrocarbon layer cannot be desorbed by standard vacuum baking procedures, whilst ion bombardment will even increase the rate of the layer formation. Auch in arXiv erschienen http://arxiv.org/abs/2011.08568
Themenbereich der Metrologie Masse und abgeleitete Größen

Zitierung

Figueiredo, I., Bundaleski, N., Teodoro, O., Jousten, K., & Illgen, C. (2021). Influence of ion induced secondary electron emission on the stability of ionisation gauges. Vacuum, 184(2), 9 S. https://doi.org/10.1016/j.vacuum.2020.109907

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