| Zugriffsnummer | 44515 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | An interlaboratory study of the reproducibility of on-wafer S-parameter measurements from 140 GHz to 220 GHz |
| Autor(in); Institution |
Clarke, Roland G.; University of Leeds, Leeds, UK
Shang, Xiaobang; National Physical Laboratory (NPL), Teddington, UK
Ridler, Nick M.; National Physical Laboratory (NPL), Teddington, UK
Lozar, Roger; Fraunhofer Institute for Applied Solid State Physics, Freiburg im Breisgau, GERMANY
Probst, Thorsten; 2.2, Hochfrequenz und Felder, PTB-Braunschweig
Arz, Uwe; 2.2, Hochfrequenz und Felder, PTB-Braunschweig
|
| Quelle/Jahr | 2020 94th ARFTG Microwave Measurement Symposium (ARFTG):(2020), 1 - 4 |
| ISBN | 978-1-7281-2056-0 (PDF) ; 978-1-7281-2057-7 (PoD) |
| DOI | |
| URL | |
| Verlag | Piscataway, NJ: IEEE |
| Konferenzangaben | 94th ARFTG Microwave Measurement Conference, San Antonio, Tex., 26-29, January, 2020, USA |
| Freie Schlagworte | On-wafer measurement ; co-planar waveguide ; measurement repeatability ; measurement reproducibility ; measurement uncertainty |
| Zusammenfassung | The development, modelling and characterization of millimeter-wave semiconductor devices calls for accurate and reproducible on-wafer measurements. We report on an interlaboratory study involving on-wafer S-parameter measurements in the 140 GHz to 220 GHz band, conducted by three well-established measurement laboratories. The measurements can be used to form typical reproducibility limits for these measurements when conducted in different laboratories using different equipment and calibration methods. |
| Themenbereich der Metrologie | Elektrizität und Magnetismus |
Zitierung
Clarke, R. G., Shang, X., Ridler, N. M., Lozar, R., Probst, T., & Arz, U. (2020). An interlaboratory study of the reproducibility of on-wafer S-parameter measurements from 140 GHz to 220 GHz. 94th ARFTG Microwave Measurement Conference, San Antonio, Tex., 26-29, January, 2020, USA. https://doi.org/10.1109/arftg47584.2020.9071783