| Zugriffsnummer | 44489 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers |
| Autor(in); Institution |
Siefke, Thomas; 4.01, Metrologie für funktionale Nanosysteme, PTB-Braunschweig; Friedrich-Schiller-Universität Jena, Abbe Center of Photonics, Institute of Applied Physics, Jena, GERMANY
Rojas Hurtado, Carol Bibiana; 4.01, Metrologie für funktionale Nanosysteme, PTB-Braunschweig
Dickmann, Johannes; 4.01, Metrologie für funktionale Nanosysteme, PTB-Braunschweig
Dickmann, Walter; 4.01, Metrologie für funktionale Nanosysteme, PTB-Braunschweig; Technische Universität Braunschweig, LENA Laboratory for Emerging Nanometrology, Braunschweig, GERMANY
Käseberg, Tim; 4.2, Bild- und Wellenoptik, PTB-Braunschweig; 4.01, Metrologie für funktionale Nanosysteme, PTB-Braunschweig
Meyer, Jan; 4.01, Metrologie für funktionale Nanosysteme, PTB-Braunschweig; Technische Universität Braunschweig, LENA Laboratory for Emerging Nanometrology, Braunschweig, GERMANY
Burger, Sven; Zuse-Institut Berlin, Berlin, GERMANY
Zeitner, Uwe; Friedrich-Schiller-Universität Jena, Abbe Center of Photonics, Institute of Applied Physics, Jena, GERMANY; Fraunhofer IOF Jena, Jena, GERMANY
Bodermann, Bernd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Kroker, Stefanie; 4.01, Metrologie für funktionale Nanosysteme, PTB-Braunschweig; Technische Universität Braunschweig, LENA Laboratory for Emerging Nanometrology, Braunschweig, GERMANY
|
| Quelle/Jahr | Optics Express: 28 (2020), 16, 23122 - 23132 |
| Availability | [online only] |
| ISSN | 1094-4087 |
| DOI | |
| Verlag | Washington, DC: Optical Society of America (OSA) |
| Zusammenfassung | We demonstrate the retrieval of deep subwavelength structural information in nano-optical polarizers by scatterometry of quasi-bound states in the continuum (quasi-BICs). To this end, we investigate titanium dioxide wire grid polarizers for application wavelengths in the deep ultraviolet (DUV) spectral range fabricated with a self-aligned double-patterning process. In contrast to the time-consuming and elaborate measurement techniques like scanning electron microscopy, asymmetry induced quasi-BICs occurring in the near ultraviolet and visible spectral range provide an easily accessible and efficient probe mechanism. Thereby, dimensional parameters are retrieved with uncertainties in the sub-nanometer range. Our results show that BICs are a promising tool for process control in optics and semiconductor technology. |
| Kostenfreier Zugang | Open Access Gold |
| Themenbereich der Metrologie | Nanometrologie |
Zitierung
Siefke, T., Rojas Hurtado, C. B., Dickmann, J., Dickmann, W., Käseberg, T., Meyer, J., Burger, S., Zeitner, U., Bodermann, B., & Kroker, S. (2020). Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers. Optics Express, 28(16), 23122–23132. https://doi.org/10.1364/oe.396044